Ion temperature in an electron cyclotron resonance plasma as determined by laser induced fluorescence Doppler width measurements

1990 ◽  
Author(s):  
E.A. Den Hartog ◽  
H. Persing ◽  
R.C. Woods
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Laser Induced Fluorescence ◽  
Electron Cyclotron ◽  
Doppler Width ◽  
Ion Temperature ◽  
Electron Cyclotron Resonance Plasma ◽  
Width Measurements ◽  
Resonance Plasma

Measurement of Ion Temperature in Electron Cyclotron Resonance Plasma

1993 ◽  
Vol 32 (Part 2, No. 11B) ◽  
pp. L1698-L1700 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Yasunori Ohtsu ◽  
Hiroharu Fujita ◽  
Wei Chen ◽  
Shoji Miyake
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Ion Temperature ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Ion temperature and fluctuation in a large-diameter electron–cyclotron-resonance plasma

Vacuum ◽  
2002 ◽  
Vol 66 (3-4) ◽  
pp. 329-334 ◽  
Author(s):  
Mayuko Koga ◽  
Takenori Yoshizawa ◽  
Yoko Ueda ◽  
Akira Yonesu ◽  
Yoshinobu Kawai
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Large Diameter ◽  
Electron Cyclotron ◽  
Ion Temperature ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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