Simulation study of a capacitively coupled plasma torch array

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677852 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo

Keyword(s):

Simulation Study ◽

Plasma Torch ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Simulation study of a capacitively coupled plasma torch array

IEEE Transactions on Plasma Science ◽

10.1109/27.912941 ◽

2001 ◽

Vol 29 (1) ◽

pp. 51-56 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo

Keyword(s):

Simulation Study ◽

Plasma Torch ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Demonstration and characterization of a capacitively coupled plasma torch array

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677907 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo

Keyword(s):

Plasma Torch ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Analytical characterisation of a capacitively coupled plasma torch with a central tube electrode

Talanta ◽

10.1016/s0039-9140(98)00099-x ◽

1999 ◽

Vol 48 (4) ◽

pp. 827-837 ◽

Author(s):

E Cordos

Keyword(s):

Plasma Torch ◽

Capacitively Coupled ◽

Central Tube ◽

Tube Electrode ◽

Capacitively Coupled Plasma

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Simulation Study of Hollow Cathode Enhanced Radio Frequency Capacitively Coupled Plasma Discharges

10.1109/icops35962.2018.9575977 ◽

2018 ◽

Author(s):

W. K. Tseng ◽

H. C. Chang ◽

C. Y. Chen ◽

K. C. Leou

Keyword(s):

Radio Frequency ◽

Simulation Study ◽

Hollow Cathode ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Simulation study of a capacitively coupled plasma by two dimensional fluid model

2009 IEEE International Conference on Plasma Science - Abstracts ◽

10.1109/plasma.2009.5227362 ◽

2009 ◽

Author(s):

C. Y. Huang ◽

M. W. Liang ◽

C. H. Chang ◽

K. F. Lee ◽

C. C. Wang

Keyword(s):

Simulation Study ◽

Fluid Model ◽

Two Dimensional ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

Physics of Plasmas ◽

10.1063/1.4816952 ◽

2013 ◽

Vol 20 (7) ◽

pp. 073507 ◽

Author(s):

S. Sharma ◽

M. M. Turner

Keyword(s):

Simulation Study ◽

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Sheath Region ◽

Capacitively Coupled Plasma ◽

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Model and simulation of a capacitively coupled plasma torch array

10.2514/6.1999-3727 ◽

1999 ◽

Author(s):

S. Kuo ◽

E. Koretzky

Keyword(s):

Plasma Torch ◽

Capacitively Coupled ◽

Model And Simulation ◽

Capacitively Coupled Plasma

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Simulation study of stochastic heating in dual frequency capacitively coupled plasma discharges

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383809 ◽

2012 ◽

Author(s):

S. Sharma ◽

M. Turner

Keyword(s):

Simulation Study ◽

Dual Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Stochastic Heating ◽

Capacitively Coupled Plasma

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Dust transport phenomena in a capacitively coupled plasma reactor

Journal of Applied Physics ◽

10.1063/1.1285843 ◽

2001 ◽

Vol 89 (1) ◽

pp. 34-41 ◽

Author(s):

Heon Chang Kim ◽

Vasilios I. Manousiouthakis

Keyword(s):

Plasma Reactor ◽

Transport Phenomena ◽

Capacitively Coupled ◽

Dust Transport ◽

Capacitively Coupled Plasma

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Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

Applied Physics Letters ◽

10.1063/1.127020 ◽

2000 ◽

Vol 77 (4) ◽

pp. 489-491 ◽

Author(s):

T. Kitajima ◽

Y. Takeo ◽

Z. Lj. Petrović ◽

T. Makabe

Keyword(s):

Capacitively Coupled ◽

Capacitively Coupled Plasma

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