Simulation study of a capacitively coupled plasma by two dimensional fluid model

2009 ◽  
Author(s):  
C. Y. Huang ◽  
M. W. Liang ◽  
C. H. Chang ◽  
K. F. Lee ◽  
C. C. Wang
Keyword(s):  
Simulation Study ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
...  
Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

1994 ◽  
Vol 64 (14) ◽  
pp. 1780-1782 ◽  
Author(s):  
P. M. Meijer ◽  
J. D. P. Passchier ◽  
W. J. Goedheer ◽  
J. Bezemer ◽  
W. G. J. H. M. van Sark
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Quantitative simulations of ratchet potential in a dusty plasma ratchet

2021 ◽  
Author(s):  
Shuo Wang ◽  
Ning Zhang ◽  
Shun-xin Zhang ◽  
Miao Tian ◽  
Ya-wen Cai ◽  
...  
Keyword(s):  
Dusty Plasma ◽  
Dust Particle ◽  
Cross Sections ◽  
Fluid Model ◽  
Charged Dust ◽  
Two Dimensional ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Electric Potentials ◽  
Ratchet Potential

Abstract Using a dusty plasma ratchet, one can realize the rectification of charged dust particle in a plasma. To obtain the ratchet potential dominating the rectification, here, we perform quantitative simulations based on a two-dimensional fluid model of capacitively coupled plasma. Plasma parameters are firstly calculated in two typical cross sections of the dusty plasma ratchet which cut vertically the saw channel at different azimuthal positions. The balance positions of charged dust particle in the two cross sections then can be found exactly. The electric potentials at the two balance positions have different values. Using interpolation in term of a double-sine function from previous experimental measurement, an asymmetrical ratchet potential along the saw channel is finally obtained. The asymmetrical orientation of the ratchet potential depends on discharge conditions. Quantitative simulations further reproduce our previous experimental phenomena such as the rectification of dust particle in the dusty plasma ratchet.

Modeling of a capacitively coupled radio-frequency methane plasma: Comparison between a one-dimensional and a two-dimensional fluid model

2002 ◽  
Vol 92 (5) ◽  
pp. 2290-2295 ◽  
Author(s):  
D. Herrebout ◽  
A. Bogaerts ◽  
M. Yan ◽  
R. Gijbels ◽  
W. Goedheer ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
One Dimensional
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