Simulation Study of Hollow Cathode Enhanced Radio Frequency Capacitively Coupled Plasma Discharges

2018 ◽  
Author(s):  
W. K. Tseng ◽  
H. C. Chang ◽  
C. Y. Chen ◽  
K. C. Leou
Keyword(s):  
Radio Frequency ◽  
Simulation Study ◽  
Hollow Cathode ◽  
Plasma Discharges ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (2) ◽  
pp. 601-606 ◽  
Author(s):  
G.V. Paeva ◽  
R.P. Dahiya ◽  
G.M.W. Kroesen ◽  
W.W. Stoffels
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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