Review of ionized-PVD by hollow cathode magnetron sputtering
2011 ◽
Vol 54
(2)
◽
pp. 20801
◽
Keyword(s):
2000 ◽
pp. 95-139
◽
1986 ◽
Vol 4
(3)
◽
pp. 393-396
◽
1988 ◽
Vol 6
(3)
◽
pp. 1772-1774
◽
Keyword(s):
Keyword(s):
1981 ◽
Vol 17
(6)
◽
pp. 3432-3434
◽
Keyword(s):