Photoresists stripping using dielectric barrier glow discharge plasma system

2012 ◽  
Author(s):  
Yuanwei Wu ◽  
Shaoxia Jia ◽  
Lingli Zhao ◽  
Shouguo Wang
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Plasma System ◽  
Dielectric Barrier

Surface Treatment of PMIA Fibers with Sub-Atmospheric Pressure Dielectric Barrier Glow Discharge Plasma

2014 ◽  
Vol 1048 ◽  
pp. 72-76
Author(s):  
Huan Da Zheng ◽  
Juan Zhang ◽  
Bing Du ◽  
Qu Fu Wei ◽  
Lai Jiu Zheng
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Chemical Structure ◽  
Surface Characterization ◽  
Discharge Plasma ◽  
Treatment Time ◽  
Fiber Surface ◽  
Glow Discharge Plasma ◽  
Dielectric Barrier ◽  
Ft Ir

Meta-aramid fibers were treated by sub-atmospheric pressure dielectric barrier glow discharge plasma. The effect of plasma treatment time on the fiber surface physical and chemical properties was studied by using surface characterization techniques. Scanning electron microscopy (SEM) was performed to determine the surface morphology changes. FT-IR spectroscopy measurements were performed to investigate the change of chemical structure. Dynamic contact angle analysis (DCAA) was used to examine the changes of the fiber surface wettability. SEM analysis showed that there was obvious crack along the fibers’ axial direction present on the fiber surface, which resulted in the better wetting behavior of the plasma-treated PMIA fiber. FT-IR analysis showed that plasma had little effect on the chemical structure of PMIA fibers. DCAA analysis showed that the wettability of the samples could be improved with the treatment time increasing. In addition, a slight decrease in breaking strength was observed at the treatment time ranging from 60 to 180 s in comparison with the untreated sample.

Simulations of self-organized filaments in a dielectric barrier glow discharge plasma

1999 ◽  
Vol 85 (11) ◽  
pp. 7569-7572 ◽  
Author(s):  
I. Brauer ◽  
C. Punset ◽  
H.-G. Purwins ◽  
J. P. Boeuf
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dielectric Barrier ◽  
Self Organized

scholarly journals The generation characteristics of dielectric barrier glow discharge plasma in air

2013 ◽  
Vol 441 ◽  
pp. 012023 ◽  
Author(s):  
Guangliang Sun ◽  
Wenzheng Liu ◽  
Chuanhui Li ◽  
Rongrong Zhang
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dielectric Barrier
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