Abstract
In wafer fabrication (Fab), Fluorine (F) based gases are used for Al bondpad opening process. Thus, even on a regular Al bondpad, there exists a low level of F contamination. However, the F level has to be controlled at a lower level. If the F level is higher than the control/spec limits, it could cause F-induced corrosion and Al-F defects, resulting in pad discoloration and NSOP problems. In our previous studies [1-5], the theories, characteristics, chemical and physical failure mechanisms and the root causes of the F-induced corrosion and Al-F defects on Al bondpads have been studied. In this paper, we further study F-induced corrosion and propose to establish an Auger monitoring system so as to monitor the F contamination level on Al bondpads in wafer fabrication. Auger monitoring frequency, sample preparation, wafer life, Auger analysis points, control/spec limits and OOC/OOS quality control procedures are also discussed.
This paper proposed a low cost wireless monitoring system based on ZigBee wireless transmission, and designed a new floating voltage sensor which is suitable for the monitoring of medium voltage and high voltage(MV/HV) public equipment. The system used TI-CC2530 as the controller, proposed a new moving average voltage sensing(MAVS) algorithm by reasonable assumptions, and adopted algorithms to perform the theoretical analysis for the single phase and three-phase voltage. At last, the author carried out a practical experiment on the wireless floating voltage sensor under the voltage up to 30kV, the experimental results showed that the proposed low cost wireless sensor can achieve a good voltage monitoring function, and the error is less than 3%.
Wireless multi-point real-time environmental monitoring system based on LabVIEW is composed of three parts: wireless environment information collection node, communication gateway, and host computer monitoring system. The purpose of this study is to explore the application of wireless monitoring technology in industry. Since that it is at the stage of research feasibility, various sensors used for the applications select the level limited to the ordinary teaching using sensor. AGV uses vehicle manipulator developed by Wuhan Depushi Technology Company and some sensors are simulated. The results of simple basic experiments showed that the wireless module can achieve point to multipoint communication. It is concluded that the monitoring interface can simultaneously process the data of a simulated pipeline terminal node with a simulated AGV data and make them work in a closed loop state.
Software for monitoring and evaluating the performance of gas turbines is being developed under the auspices of Gas Research Institute (GRI). Reference [1] provides an overview of the GRI project.
This paper describes the PEGASUS software and monitoring system. PEGASUS is an acronym for Performance Evaluation of GAS Users Systems. Field test results, on multi-shaft turbines used in the gas pipeline industry, have demonstrated the potential of the software. The software and instrumentation, can help identify maintenance and upgrade actions to improve performance.
A wireless monitoring system for comparison photovoltaic and photovoltaic thermal characteristics