Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated with Displacement Sensor

Author(s):  
Seyedfakhreddin Nabavi ◽  
Michael Menard ◽  
Frederic Nabki
Micromachines ◽  
2017 ◽  
Vol 8 (5) ◽  
pp. 159 ◽  
Author(s):  
Haijun Li ◽  
Xiyu Duan ◽  
Gaoming Li ◽  
Kenn Oldham ◽  
Thomas Wang

Author(s):  
Jiangchao Wang ◽  
Bin Yi

Welding distortion of pozidriv-type welded structure with rectangular pipes by 20 welding passes was examined with experimental and computational approaches, and mitigation techniques were also investigated for precision fabrication. Welding experiment to fabricate pozidriv type welded structure was conducted beforehand, and out-of-plane welding distortion was measured with contact type displacement sensor. Effective thermal elastic plastic finite element computation with iterative substructure method and parallel computation was developed, and then employed to examine the thermal-mechanical response during the entire welding process and predict the residual out-of-plane welding distortion. Good agreement between computed results and measurement data was observed with comparison. The influences of welding sequence and clamping constraint with tack welding on welding distortion were considered, which were also practiced for out-of-plane welding distortion mitigation. Both experiment and finite element computation show that out-of-plane welding distortion with welding sequence optimization and clamping constraint can be significantly reduced with about 38% and 56% magnitude of original welding distortion, respectively, while their mechanisms were also clarified by means of stiffness variation of solving welded structure.


2009 ◽  
Vol 25 (4) ◽  
pp. 379-388
Author(s):  
K.-C. Chuang ◽  
C.-C. Ma ◽  
C.-Y. Liang

ABSTRACTA fiber Bragg grating (FBG) sensor system which can simultaneously measure the point-wise, out-of-plane and in-plane dynamic displacements is proposed. A demodulation system based on the fiber Bragg grating filter is used. The steady-state responses of particle motions of a piezoceramic plate measured by the FBG out-of-plane and in-plane displacement sensors are simultaneously compared with those obtained by a laser Doppler vibrometer (LDV) and a surface-mounted FBG strain sensor, respectively. The integration of the FBG displacement sensor with a dynamic signal analyzer (FBG-DSA) forms a measurement system which has the ability to acquire the frequency response of a piezoceramic plate. An LDV-DSA system and an impedance analyzer are used to compare the results obtained from the dynamic signal analyzer combined with the out-of-plane FBG sensor (OFBG-DSA) and the in-plane FBG sensor (IFBG-DSA), respectively. The experimental results of the impulse excitation as well as the random excitation of the piezoceramic plate are also presented. To explain the experimental results, an optical full-field measurement technique called amplitude-fluctuation electronic speckle pattern interferometry (AF-ESPI) and FEM numerical calculations are also used to provide full-field vibration mode shapes of the piezoceramic plate. These results indicate that the proposed displacement sensor system has the multiplexing capability to measure the dynamic displacements up to 45kHz.


Author(s):  
G.A. Bertero ◽  
R. Sinclair

Pt/Co multilayers displaying perpendicular (out-of-plane) magnetic anisotropy and 100% perpendicular remanent magnetization are strong candidates as magnetic media for the next generation of magneto-optic recording devices. The magnetic coercivity, Hc, and uniaxial anisotropy energy, Ku, are two important materials parameters, among others, in the quest to achieving higher recording densities with acceptable signal to noise ratios (SNR). The relationship between Ku and Hc in these films is not a simple one since features such as grain boundaries, for example, can have a strong influence on Hc but affect Ku only in a secondary manner. In this regard grain boundary separation provides a way to minimize the grain-to-grain magnetic coupling which is known to result in larger coercivities and improved SNR as has been discussed extensively in the literature for conventional longitudinal recording media.We present here results from the deposition of two Pt/Co/Tb multilayers (A and B) which show significant differences in their coercive fields.


2008 ◽  
Vol 128 (4) ◽  
pp. 289-297 ◽  
Author(s):  
Tsutomu Mizuno ◽  
Shigemi Enoki ◽  
Takashi Asahina ◽  
Takayuki Suzuki ◽  
Hiroyuki Maeda ◽  
...  

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