Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements

A non-contact testing and characterization method based on air-coupled acoustic excitation and interferometric displacement measurements of micro-scale MEMS structures at room conditions is introduced. In demonstrating its potential uses in testing and characterization, the present non-contact approach is applied to (i) micro-cantilever beams and (ii) rotational disk oscillators. Air-coupled multi-mode excitation of micromechanical cantilever-type oscillators under a pulsed acoustic field generated by an air-coupled transducer is demonstrated and reported. Also, the testing and characterization of a micro-scale rotational disk oscillator developed for a new class of sensor platform is demonstrated. The main design objective of the rotational disk oscillator class is to overcome the out-of-plane motion related sensitivity limitations of the cantilever-based sensors at high frequency operations. The dynamics of the rotational disk oscillators is more complex than micro-cantilever beams due to its in-plane motion in addition to its various out-of-plane modes of vibration. The fabrication of a rotational disk oscillator requires a suspended disk whose underside is visibly inaccessible due to a narrow micro-gap. In addition to the dynamic characterization of the cantilever beams and rotational disk oscillators, the current investigation demonstrates that the presented approach can address unique structural concerns such as the verification of a gap separation of the rotational oscillator from the underlying silicon substrate. Utilizing the proposed technique, the resonant frequencies of the oscillator structures are obtained and its potential uses in the testing and characterization of micro-scale structures are discussed. The major specific advantages of the introduced approach include that (i) its noncontact nature can eliminate testing problems associated with stiction and adhesion, and (ii) it allows direct mechanical characterization and testing of components and sub-components of a micro-scale devices.

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Synthesis and Piezoelectric Characterization of UV-Curable Nanocellulose/ZnO/AlN Polymeric Flexible Films for Green Energy Generation Applications

Proceedings ◽

10.3390/proceedings2020056036 ◽

2020 ◽

Vol 56 (1) ◽

pp. 36

Author(s):

Maria Assunta Signore ◽

Giulio Malucelli ◽

Donatella Duraccio ◽

Chiara De Pascali ◽

Ambra Fioravanti ◽

...

Keyword(s):

Energy Generation ◽

Green Energy ◽

Nitride Film ◽

Cantilever Beams ◽

Functional Coatings ◽

Uv Curable ◽

Mass Insertion ◽

Flexible Films ◽

Piezoelectric Behavior

In this work, the fabrication of composites consisting of piezoelectric ZnO ceramic nanostructures and nanocellulose fillers in a UV-cured acrylic matrix has been exploited for the design of new functional coatings for green energy generation. The piezoelectric behavior was investigated at different accelerations applied to cantilever beams. The piezoelectric signal generated by the different ZnO nanostructures was improved by aluminum nitride film integration on the beam and proof mass insertion at the tip.

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Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load

Sensors and Actuators A Physical ◽

10.1016/j.sna.2012.07.020 ◽

2012 ◽

Vol 185 ◽

pp. 109-116 ◽

Cited By ~ 16

Author(s):

Cuong Do ◽

Maryna Lishchynska ◽

Kieran Delaney ◽

Martin Hill

Keyword(s):

Closed Form ◽

Cantilever Beams ◽

Micro Cantilever

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Design and Characterization of Single Beam for Latching Electrothermal Microswitch

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.468-471.286 ◽

2012 ◽

Vol 468-471 ◽

pp. 286-289

Author(s):

Ying Zhang ◽

Hong Wang ◽

Yan Wang ◽

Sheng Ping Mao ◽

Gui Fu Ding

Keyword(s):

Mechanical Performance ◽

Stable State ◽

Cantilever Beams ◽

Analysis Software ◽

Stable States ◽

Element Analysis ◽

Single Beam ◽

Fabrication And Characterization ◽

Continuous Power

This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch consists of two cantilever beams using bimorph electrothermal actuator with mechanical latching for performing low power bistable relay applications. A stable state can be acquired without continuous power which is only needed to switch between two stable states of the microactuator. The single beam is discussed mainly to judge the possibility of realizing the designed function. First, reasonable shape of the resistance is designed using finite element analysis software ANSYS. Then, mechanical performance was characterized by WYKO NT1100 optical profiling system, the tip deflection of single beam can meet the designed demand.

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MODELING OF MONOCRYSTALLINE MAGNESIUM MICROBEAM BENDING

Acta Polytechnica CTU Proceedings ◽

10.14311/app.2018.15.0069 ◽

2018 ◽

Vol 15 ◽

pp. 69-73

Author(s):

Jiří Němeček ◽

Jan Maňák ◽

Jiří Němeček

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Deformation Energy ◽

Displacement Curve ◽

Fe Model ◽

Cantilever Beams ◽

Elastoplastic Behavior ◽

Load Displacement ◽

Micro Cantilever

This paper presents a numerical simulation of a micro-scale experiment on a magnesium alloy. Micro cantilever beams were fabricated using Focused Ion Beam technology in a single crystal of Mg. The cantilever beams have dimensions in the order of a few micrometers and a pentagonal cross section. Nanoindenter was used for cantilever beam bending and load-displacement curve was received. Cantilevers with two different crystallographic orientations were chosen for the experiment. Three dimensional numerical FE model with elastoplastic behavior respecting crystal anisotropy was used to fit experimental load displacement curves. Strengths and deformation energy were evaluated from the models for each cantilever.

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Effect of Dielectric-Layer on the Stress Field of Micro Cantilever Beams at the Onset of Pull-In Instability

Journal of Mechanics ◽

10.1017/jmech.2013.67 ◽

2013 ◽

Vol 30 (1) ◽

pp. 49-56 ◽

Cited By ~ 1

Author(s):

E. Yazdanpanahi ◽

A. Noghrehabadi ◽

M. Ghalambaz

Keyword(s):

Stress Distribution ◽

Dielectric Layer ◽

Adomian Decomposition Method ◽

Bending Moment ◽

Distributed Parameter ◽

Cantilever Beams ◽

Layer Parameter ◽

Adomian Decomposition ◽

Micro Cantilever ◽

Good Agreement

ABSTRACTIn this paper, stress distribution of micro cantilever beams in the presence of a dielectric-layer is studied using an analytic method. The Modified Adomian Decomposition Method (MADM) is applied to obtain a semi-analytical solution for a distributed parameter model of the micro cantilever beam. The important parameters for designing and manufacturing micro-actuators such as shear force, bending moment and stress distribution along the cantilevers are computed for different values of the dielectric-layer parameter. The results of MADM are compared with the numerical results, and they found in good agreement. It is found that increase of the dielectric-layer parameter increases the dimensionless pull-in voltage, tip deflection, internal stress and bending moment of the micro cantilever actuators at the onset of pull-in instability.

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Micro Cantilever Beam Theory for Transverse Dynamics Using a Continuum Mechanics Model

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.415-417.760 ◽

2011 ◽

Vol 415-417 ◽

pp. 760-763

Author(s):

Cheng Li ◽

Wei Guo Huang ◽

Lin Quan Yao

Keyword(s):

Scale Parameter ◽

Beam Theory ◽

Nonlocal Elasticity Theory ◽

Small Scale ◽

Beam Model ◽

Cantilever Beams ◽

Mechanics Model ◽

Axial Tension ◽

Vibrational Characteristics ◽

Micro Cantilever

The vibrational characteristics of cantilever beams with initial axial tension were studied using a nonlocal continuum Euler-Bernoulli beam model. Small size effects are essential to nanotechnology and it can not be ignored in micro or nano scale. Nonlocal elasticity theory has been proved to work well in nanomechanics and it is considered into the governing equation which can be transformed into a fourth-order ordinary differential equation together with a dispersion relation. Boundary conditions are applied so as to determine the analytical solutions of vibrational mode shape and transverse deformation through a numerical method. Relations between natural frequency and the small scale parameter are obtained, including the fundamental and the second order frequencies. It is found that both the small scale parameter and dimensionless initial axial tension play remarkable roles in dynamic behaviors of micro cantilever beams and their effects are analyzed and discussed in detail.

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Restoring Force Surface Analysis of Nonlinear Vibration Data From Micro-Cantilever Beams

Microelectromechanical Systems ◽

10.1115/imece2006-14905 ◽

2006 ◽

Cited By ~ 2

Author(s):

Matthew S. Allen ◽

Hartono (Anton) Sumali ◽

David S. Epp

Keyword(s):

Functional Form ◽

Piecewise Linear ◽

Cantilever Beams ◽

Restoring Force ◽

Vibration Data ◽

Surface Method ◽

Highly Nonlinear ◽

Nonlinear Dynamic Characteristics ◽

Restoring Forces ◽

Micro Cantilever

The responses of micro-cantilever beams, with lengths ranging from 100-1500 microns, have been found to exhibit nonlinear dynamic characteristics at very low vibration amplitudes and in near vacuum. This work seeks to find a functional form for the nonlinear forces acting on the beams in order to aide in identifying their cause. In this paper, the restoring force surface method is used to non-parametrically identify the nonlinear forces acting on a 200 micron long beam. The beam response to sinusoidal excitation contains as many as 19 significant harmonics within the measurement bandwidth. The nonlinear forces on the beam are found to be oscillatory and to depend on the beam velocity. A piecewise linear curve is fit to the response in order to more easily compare the restoring forces obtained at various amplitudes. The analysis illustrates the utility of the restoring force surface method on a system with complex and highly nonlinear forces.

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