3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams

Author(s):  
Liang-Chia Chen ◽  
Kuang-Chao Fan ◽  
Chi-Duen Lin ◽  
Calvin C. Chang ◽  
Ching-Fen Kao ◽  
...  
Author(s):  
Jian Chen ◽  
Ganesh Subramanian ◽  
Justin Ricci ◽  
Liang Ban ◽  
Cetin Cetinkaya

A non-contact testing and characterization method based on air-coupled acoustic excitation and interferometric displacement measurements of micro-scale MEMS structures at room conditions is introduced. In demonstrating its potential uses in testing and characterization, the present non-contact approach is applied to (i) micro-cantilever beams and (ii) rotational disk oscillators. Air-coupled multi-mode excitation of micromechanical cantilever-type oscillators under a pulsed acoustic field generated by an air-coupled transducer is demonstrated and reported. Also, the testing and characterization of a micro-scale rotational disk oscillator developed for a new class of sensor platform is demonstrated. The main design objective of the rotational disk oscillator class is to overcome the out-of-plane motion related sensitivity limitations of the cantilever-based sensors at high frequency operations. The dynamics of the rotational disk oscillators is more complex than micro-cantilever beams due to its in-plane motion in addition to its various out-of-plane modes of vibration. The fabrication of a rotational disk oscillator requires a suspended disk whose underside is visibly inaccessible due to a narrow micro-gap. In addition to the dynamic characterization of the cantilever beams and rotational disk oscillators, the current investigation demonstrates that the presented approach can address unique structural concerns such as the verification of a gap separation of the rotational oscillator from the underlying silicon substrate. Utilizing the proposed technique, the resonant frequencies of the oscillator structures are obtained and its potential uses in the testing and characterization of micro-scale structures are discussed. The major specific advantages of the introduced approach include that (i) its noncontact nature can eliminate testing problems associated with stiction and adhesion, and (ii) it allows direct mechanical characterization and testing of components and sub-components of a micro-scale devices.


Pharmaceutics ◽  
2021 ◽  
Vol 13 (5) ◽  
pp. 590
Author(s):  
Jennifer Cauzzo ◽  
Nikhil Jayakumar ◽  
Balpreet Singh Ahluwalia ◽  
Azeem Ahmad ◽  
Nataša Škalko-Basnet

The rapid development of nanomedicine and drug delivery systems calls for new and effective characterization techniques that can accurately characterize both the properties and the behavior of nanosystems. Standard methods such as dynamic light scattering (DLS) and fluorescent-based assays present challenges in terms of system’s instability, machine sensitivity, and loss of tracking ability, among others. In this study, we explore some of the downsides of batch-mode analyses and fluorescent labeling, while introducing quantitative phase microscopy (QPM) as a label-free complimentary characterization technique. Liposomes were used as a model nanocarrier for their therapeutic relevance and structural versatility. A successful immobilization of liposomes in a non-dried setup allowed for static imaging conditions in an off-axis phase microscope. Image reconstruction was then performed with a phase-shifting algorithm providing high spatial resolution. Our results show the potential of QPM to localize subdiffraction-limited liposomes, estimate their size, and track their integrity over time. Moreover, QPM full-field-of-view images enable the estimation of a single-particle-based size distribution, providing an alternative to the batch mode approach. QPM thus overcomes some of the drawbacks of the conventional methods, serving as a relevant complimentary technique in the characterization of nanosystems.


Proceedings ◽  
2020 ◽  
Vol 56 (1) ◽  
pp. 36
Author(s):  
Maria Assunta Signore ◽  
Giulio Malucelli ◽  
Donatella Duraccio ◽  
Chiara De Pascali ◽  
Ambra Fioravanti ◽  
...  

In this work, the fabrication of composites consisting of piezoelectric ZnO ceramic nanostructures and nanocellulose fillers in a UV-cured acrylic matrix has been exploited for the design of new functional coatings for green energy generation. The piezoelectric behavior was investigated at different accelerations applied to cantilever beams. The piezoelectric signal generated by the different ZnO nanostructures was improved by aluminum nitride film integration on the beam and proof mass insertion at the tip.


2017 ◽  
Vol 35 (13) ◽  
pp. 2541-2547 ◽  
Author(s):  
Zhi Qiao ◽  
Yudong Yao ◽  
Xiaochao Wang ◽  
Wei Fan ◽  
Zunqi Lin
Keyword(s):  

Author(s):  
James Magargee ◽  
Jian Cao ◽  
Rui Zhou ◽  
Morgan McHugh ◽  
Damon Brink ◽  
...  

The cyclic and compressive mechanical behavior of ultra-thin sheet metals was experimentally investigated. A novel transparent wedge device was designed and fabricated to prevent the buckling of thin sheets under compressive loads, while also allowing full field strain measurements of the specimen using digital imaging methods. Thin brass and stainless steel sheet metal specimens were tested using the micro-wedge device. Experimental results show that the device can be used to delay the onset of early buckling modes of a thin sheet under compression, which is critical in examining the compressive and cyclic mechanical behavior of sheet metals.


2018 ◽  
Vol 8 (12) ◽  
pp. 2541 ◽  
Author(s):  
Liang-Chia Chen ◽  
Ching-Wen Liang

Digital image correlation (DIC) has emerged as a popular full-field surface profiling technique for analyzing both in-plane and out-of-plane dynamic structures. However, conventional DIC-based surface 3D profilometry often yields erroneous contours along surface edges. Boundary edge detection remains one of the key issues in DIC because a discontinuous surface edge cannot be detected due to optical diffraction and height ambiguity. To resolve the ambiguity of edge measurement in optical surface profilometry, this study develops a novel edge detection approach that incorporates a new algorithm using both the boundary subset and corner subset for accurate edge reconstruction. A pre-calibrated gauge block and a circle target were reconstructed to prove the feasibility of the proposed approach. Experiments on industrial objects with various surface reflective characteristics were also conducted. The results showed that the developed method achieved a 15-fold improvement in detection accuracy, with measurement error controlled within 1%.


2021 ◽  
Author(s):  
Rui Zhao

Among numerous methods for 3D surface profiling, classic shadow moiré method has been kept as the most popular one due to its full-field feature and low cost. This thesis focuses on a computer-vision shadow moiré method with a scope to improve the measurement resolution, accuracy and efficiency. The computer automation is basically realized through the introduction of a phase-shifting technique that is incorporated with a new multi-grid least-square unwrapping algorithm. The method is enhanced by implementing a few additional image processing techniques. These techniques, when implemented, result in improved measurement accuracy and enable easy applications to irregularly shaped surfaces. The study also proposes a new, automated system calibration approach that is based on a real-time image subtraction. A data normalization process is studied to resolve possible confusions in the presentation of the original data. The verification test results show that the modified shadow moiré technique has achieved the initial goal, in that the measurement resolution now reaches a few percentage of the fringe sensititivity.


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