Film thickness measurement system using FPGA technology
2019 ◽
Vol 66
◽
pp. 86-98
◽
2013 ◽
Vol 79
(11)
◽
pp. 1078-1082
◽
2012 ◽
Vol 78
(1)
◽
pp. 86-91
Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring
2015 ◽
Vol 86
(12)
◽
pp. 123502
◽