Calculation of the optimum electron energy of a dedicated storage ring for X-ray lithography

1979 ◽  
Vol 26 (4) ◽  
pp. 693-698 ◽  
Author(s):  
H. Betz ◽  
F.K. Fey ◽  
A. Heuberger ◽  
P. Tischer
Keyword(s):  
Electron Energy ◽  
Storage Ring ◽  
X Ray

Signal/Noise Ratio and Elemental Detectivity by Eels

1982 ◽  
Vol 40 ◽  
pp. 488-489
Author(s):  
R. F. Egerton
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Elemental Analysis ◽  
Electron Energy Loss Spectroscopy ◽  
Emission Spectroscopy ◽  
X Ray ◽  
Signal Noise ◽  
Characteristic Signal ◽  
Noise Ratio ◽  
Electron Energy Loss

An important parameter governing the sensitivity and accuracy of elemental analysis by electron energy-loss spectroscopy (EELS) or by X-ray emission spectroscopy is the signal/noise ratio of the characteristic signal.

scholarly journals Development of a source of femtosecond X-ray pulses based on the electron storage ring

2003 ◽  
Author(s):  
A. Zholents ◽  
J. Byrd ◽  
S. Chattopadhyay ◽  
H. Chong ◽  
T.E. Glover ◽  
...  
Keyword(s):  
Storage Ring ◽  
Electron Storage ◽  
X Ray
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