Tracking Control of Nanopositioning Stages Using Parallel Resonant Controllers for High-Speed Nonraster Sequential Scanning
2020 ◽
pp. 1-11
Keyword(s):
2001 ◽
Keyword(s):
2019 ◽
Vol 20
(7)
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pp. 2740-2749
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Keyword(s):
Keyword(s):
2007 ◽
Vol 127
(9)
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pp. 942-949
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Keyword(s):
2006 ◽
Vol 45
(2B)
◽
pp. 1187-1192
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Keyword(s):
2010 ◽
Vol 2010
(0)
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pp. _2A2-E30_1-_2A2-E30_3
2009 ◽
Vol 2009
(0)
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pp. _1A1-D05_1-_1A1-D05_2