Three-Dimensional Integration Technology Based on Wafer Bonding With Vertical Buried Interconnections
2006 ◽
Vol 53
(11)
◽
pp. 2799-2808
◽
2006 ◽
Vol 45
(4B)
◽
pp. 3030-3035
◽
2003 ◽
Vol 11
(1)
◽
pp. 44-54
◽