Low-Temperature Microwave Annealing Processes for Future IC Fabrication—A Review

2014 ◽  
Vol 61 (3) ◽  
pp. 651-665 ◽  
Author(s):  
Yao-Jen Lee ◽  
Ta-Chun Cho ◽  
Shang-Shiun Chuang ◽  
Fu-Kuo Hsueh ◽  
Yu-Lun Lu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Microwave Annealing

Low-temperature soluble InZnO thin film transistors by microwave annealing

2011 ◽  
Vol 326 (1) ◽  
pp. 23-27 ◽  
Author(s):  
Keunkyu Song ◽  
Chang Young Koo ◽  
Taehwan Jun ◽  
Daehee Lee ◽  
Youngmin Jeong ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Microwave Annealing

Low-Temperature Ohmic Contact Formation in AlN/GaN HEMT Using Microwave Annealing

2017 ◽  
Vol 64 (3) ◽  
pp. 1385-1389 ◽  
Author(s):  
Lin-Qing Zhang ◽  
Zhuo Liu ◽  
Sheng-Xun Zhao ◽  
Min-Zhi Lin ◽  
Peng-Fei Wang
Keyword(s):  
Low Temperature ◽  
Ohmic Contact ◽  
Contact Formation ◽  
Microwave Annealing ◽  
Gan Hemt ◽  
Ohmic Contact Formation

Dopant Activation in Single-Crystalline Germanium by Low-Temperature Microwave Annealing

2011 ◽  
Vol 32 (2) ◽  
pp. 194-196 ◽  
Author(s):  
Yao-Jen Lee ◽  
Shang-Shiun Chuang ◽  
Fu-Kuo Hsueh ◽  
Ho-Ming Lin ◽  
Shich-Chuang Wu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Single Crystalline ◽  
Dopant Activation ◽  
Microwave Annealing ◽  
Crystalline Germanium

Low-temperature microwave annealing processes for future IC fabrication

2014 ◽  
Author(s):  
Yao-Jen Lee ◽  
Bo-An Tsai ◽  
Ta-Chun Cho ◽  
Fu-Kuo Hsueh ◽  
Po-Jung Sung ◽  
...  
Keyword(s):  
Low Temperature ◽  
Microwave Annealing

Low-Temperature Microwave Annealing for MOSFETs With High-k/Metal Gate Stacks

2013 ◽  
Vol 34 (10) ◽  
pp. 1286-1288 ◽  
Author(s):  
Yao-Jen Lee ◽  
Bo-An Tsai ◽  
Chiung-Hui Lai ◽  
Zheng-Yao Chen ◽  
Fu-Kuo Hsueh ◽  
...  
Keyword(s):  
Low Temperature ◽  
Gate Stacks ◽  
Metal Gate ◽  
Microwave Annealing ◽  
High K

Low-Temperature Microwave Annealing for Tunnel Field-Effect Transistor

2015 ◽  
Vol 36 (2) ◽  
pp. 105-107 ◽  
Author(s):  
Yi-Ruei Jhan ◽  
Yung-Chun Wu ◽  
Yu-Long Wang ◽  
Yao-Jen Lee ◽  
Min-Feng Hung ◽  
...  
Keyword(s):  
Low Temperature ◽  
Field Effect ◽  
Field Effect Transistor ◽  
Microwave Annealing ◽  
Effect Transistor ◽  
Tunnel Field Effect Transistor

scholarly journals Schottky Barrier Height Tuning via the Dopant Segregation Technique through Low-Temperature Microwave Annealing

Materials ◽  
2016 ◽  
Vol 9 (5) ◽  
pp. 315 ◽  
Author(s):  
Chaochao Fu ◽  
Xiangbiao Zhou ◽  
Yan Wang ◽  
Peng Xu ◽  
Ming Xu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Dopant Segregation ◽  
Microwave Annealing
Sign in / Sign up

Export Citation Format

Share Document