SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding

2012 ◽  
Vol 59 (12) ◽  
pp. 4895-4906 ◽  
Author(s):  
Henrik Gradin ◽  
Stefan Braun ◽  
Göran Stemme ◽  
Wouter van der Wijngaart
1999 ◽  
Vol 96 (6) ◽  
pp. 715-720
Author(s):  
G. Danloy ◽  
J. Mignon ◽  
L. Bonte
Keyword(s):  

2003 ◽  
Vol 105 (3) ◽  
pp. 237-246 ◽  
Author(s):  
Lena Klintberg ◽  
Mikael Karlsson ◽  
Lars Stenmark ◽  
Greger Thornell

1980 ◽  
Vol 67 (4) ◽  
pp. 1413-1413
Author(s):  
George J. Kay ◽  
Alan Keskimen

1971 ◽  
Vol 93 (3) ◽  
pp. 200-205
Author(s):  
Seth R. Goldstein ◽  
Andrew C. Harvey

Two passive gas flow controllers are presented which provide compensation for variations in ambient temperature and supply pressure. One technique, which provides first-order error compensation, utilizes a choked orifice having its area linearily varied in proportion to a diaphragm deflection. Compensation is achieved by applying upstream pressure to one side of the diaphragm, and by applying a trapped gas pressure proportional to absolute temperature on the other side of the diaphragm. General design relationships are presented, and a prototype unit constructed to control a minute flow rate of high-pressure oxygen is described. A second flow control technique is presented which provides the required nonlinear temperature compensation for flow supplied through a constant-area choked orifice. This is achieved by utilizing a compliant volume of trapped gas to generate a pressure proportional to the square root of absolute temperature. This pressure is used to control the pressure upstream of the choked orifice, thus providing constant flow.


Author(s):  
Kevin Boyd ◽  
Adam Monkowski ◽  
Jialing Chen ◽  
Tao Ding ◽  
Ray Malone ◽  
...  

Author(s):  
M. Zheng ◽  
G. T. Reader

Exhaust purification for lean-burn internal combustion engines has been impaired by the relatively low temperature of the exhaust that makes conventional passive aftertreatment schemes less energy-efficient in oxidation/regeneration. To tackle such adversaries, an active-flow control scheme, reversal-flow control, is outlined and analyzed in this paper. Preliminary energy-efficiency analyses are performed with different gas flow rate, flow reversal frequency, and monolith-solid properties. Simulation results indicate that through active thermal management the supplemental energy consumption can be drastically reduced, which is also supported by previous empirical studies.


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