A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage

2020 ◽  
Vol 67 (12) ◽  
pp. 10897-10904 ◽  
Author(s):  
Haixiang Zhan ◽  
Wu Zhou ◽  
Longqi Ran ◽  
Huijun Yu ◽  
Bei Peng ◽  
...  
IEEE Access ◽  
2021 ◽  
Vol 9 ◽  
pp. 4673-4687
Author(s):  
Jixiang Zhao ◽  
Shanwei Liu ◽  
Jianhua Wan ◽  
Muhammad Yasir ◽  
Huayu Li

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