A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage
2020 ◽
Vol 67
(12)
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pp. 10897-10904
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2014 ◽
Vol 35
(10)
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pp. 2518-2523
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2018 ◽
Vol 61
(11)
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pp. 2787-2800
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