Patterning effect on easy axis alignment in permalloy thin film

1984 ◽  
Vol 20 (3) ◽  
pp. 485-488 ◽  
Author(s):  
Y. Shiroishi ◽  
K. Shiiki ◽  
I. Yuitoo ◽  
H. Tanabe ◽  
H. Fujiwara ◽  
...  
Keyword(s):  
2010 ◽  
Vol 25 (8) ◽  
pp. 1507-1515 ◽  
Author(s):  
Fan Xu ◽  
Nancy J. Dudney ◽  
Gabriel M. Veith ◽  
Yoongu Kim ◽  
Can Erdonmez ◽  
...  

The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10–100 μm arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 ± 1 μS/cm.


2005 ◽  
Vol 87 (20) ◽  
pp. 202508 ◽  
Author(s):  
J. W. Harrell ◽  
S. Kang ◽  
Z. Jia ◽  
D. E. Nikles ◽  
R. Chantrell ◽  
...  

1997 ◽  
Vol 475 ◽  
Author(s):  
L. Ressier ◽  
H. Jaffres ◽  
A. Schuhl ◽  
F. Nguyen Van Dau ◽  
M. Goiran ◽  
...  

ABSTRACTThe <Atomic Saw> method has been successfully used to cut a Fe thin film, epitaxially grown onto a (001) MgO substrate, into stripes (widths ranging from 1 μm to 100 nm) and boxes (lateral sizes ranging from 1 μm to 3 μm). A structural analysis of these magnetic structures by atomic force microscopy has shown that their geometries are controlled by the plastic strain. A magnetooptical study of the Fe stripes has revealed a surprising uniaxial magnetic anisotropy with an in-plane easy axis perpendicular to the stripes. This strong anisotropy can be explained by an anisotropie relaxation of the misfit between the starting Fe film and the MgO substrate, induced by the cutting into stripes. Magnetooptical experiments on boxes have revealed that the initial cubic symmetry is recovered since, in this case, the relaxation is similar in perpendicular directions. They have also proved that their magnetization reversal is governed by nucleation phenomena.


2010 ◽  
Vol 20 (2) ◽  
pp. 35-40 ◽  
Author(s):  
Jong-Gu Choi ◽  
Tae-Joon Kwak ◽  
Sang-Suk Lee ◽  
Jung-Taek Sim

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