A Stick-Slip Positioning Stage Robust to Load Variations
2016 ◽
Vol 21
(4)
◽
pp. 2165-2173
◽
2012 ◽
Vol 2
(2)
◽
pp. 1-14
◽
2019 ◽
Vol 297
◽
pp. 111547
◽
Keyword(s):
2011 ◽
Vol 225-226
◽
pp. 684-687
◽
2012 ◽
Vol 271-272
◽
pp. 1356-1361
◽
Keyword(s):
2019 ◽
Vol 25
(10)
◽
pp. 3713-3721
◽