scholarly journals Dark Current Random Telegraph Signals in Solid-State Image Sensors

2013 ◽  
Vol 60 (6) ◽  
pp. 4323-4331 ◽  
Author(s):  
Cedric Virmontois ◽  
Vincent Goiffon ◽  
Mark S. Robbins ◽  
Laurie Tauziede ◽  
Herve Geoffray ◽  
...  
2011 ◽  
Vol 58 (6) ◽  
pp. 3085-3094 ◽  
Author(s):  
Cedric Virmontois ◽  
V. Goiffon ◽  
P. Magnan ◽  
O. Saint-Pe ◽  
S. Girard ◽  
...  

2017 ◽  
Vol 64 (1) ◽  
pp. 19-26 ◽  
Author(s):  
Clementine Durnez ◽  
Vincent Goiffon ◽  
Cedric Virmontois ◽  
Jean-Marc Belloir ◽  
Pierre Magnan ◽  
...  

Sensors ◽  
2019 ◽  
Vol 19 (9) ◽  
pp. 2073 ◽  
Author(s):  
Kazunari Kurita ◽  
Takeshi Kadono ◽  
Satoshi Shigematsu ◽  
Ryo Hirose ◽  
Ryosuke Okuyama ◽  
...  

We developed silicon epitaxial wafers with high gettering capability by using hydrocarbon–molecular–ion implantation. These wafers also have the effect of hydrogen passivation on process-induced defects and a barrier to out-diffusion of oxygen of the Czochralski silicon (CZ) substrate bulk during Complementary metal-oxide-semiconductor (CMOS) device fabrication processes. We evaluated the electrical device performance of CMOS image sensor fabricated on this type of wafer by using dark current spectroscopy. We found fewer white spot defects compared with those of intrinsic gettering (IG) silicon wafers. We believe that these hydrocarbon–molecular–ion–implanted silicon epitaxial wafers will improve the device performance of CMOS image sensors.


2020 ◽  
Vol 67 (11) ◽  
pp. 4940-4946
Author(s):  
Clementine Durnez ◽  
Vincent Goiffon ◽  
Cedric Virmontois ◽  
Pierre Magnan ◽  
Laurent Rubaldo

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