Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes

2013 ◽  
Vol 41 (8) ◽  
pp. 1856-1862 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yoshiki Yahata ◽  
Johji Kagami ◽  
Yasushi Kawashimo ◽  
Tatsuya Takeuchi
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Surface plasma source with saddle antenna radio frequency plasma generator

2012 ◽  
Vol 83 (2) ◽  
pp. 02A712 ◽  
Author(s):  
V. Dudnikov ◽  
R. P. Johnson ◽  
S. Murray ◽  
T. Pennisi ◽  
C. Piller ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Generator ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Surface Plasma ◽  
Frequency Plasma
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