Low-stress wafer-level transfer bonding of polymer layers using floatation

2011 ◽  
Author(s):  
J.M. Karlsson ◽  
T. Haraldsson ◽  
C.F. Carlborg ◽  
W. van der Wijngaart
Keyword(s):  
Wafer Level ◽  
Polymer Layers ◽  
Wafer Level Transfer

Low Warpage Wafer Level Transfer Molding Post 3D Die to Wafer Assembly

2016 ◽  
Author(s):  
Francisco Cadacio ◽  
Teng Wang ◽  
Abdellah Salahouelhadj ◽  
Giovanni Capuz ◽  
Goedele Potoms ◽  
...  
Keyword(s):  
Wafer Level ◽  
Transfer Molding ◽  
Wafer Level Transfer

Wafer-Level Transfer of Thermo-Piezoelectric Si>inf/infinf/inf

2006 ◽  
Author(s):  
Young-Sik Kim ◽  
Hyo-Jin Nam ◽  
SeongSoo Jang ◽  
Caroline Sunyong Lee ◽  
Won-Hyeog Jin ◽  
...  
Keyword(s):  
Data Storage ◽  
High Density ◽  
Cmos Circuit ◽  
Wafer Level ◽  
Cantilever Array ◽  
Wafer Level Transfer ◽  
Density Probe

Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches

2010 ◽  
Vol 19 (3) ◽  
pp. 548-560 ◽  
Author(s):  
Roland Guerre ◽  
Ute Drechsler ◽  
Debabrata Bhattacharyya ◽  
Pekka Rantakari ◽  
Richard Stutz ◽  
...  
Keyword(s):  
Rf Mems ◽  
Wafer Level ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Wafer Level Transfer

Low-temperature wafer-level transfer bonding

2001 ◽  
Vol 10 (4) ◽  
pp. 525-531 ◽  
Author(s):  
F. Niklaus ◽  
P. Enoksson ◽  
P. Griss ◽  
E. Kalvesten ◽  
G. Stemme
Keyword(s):  
Low Temperature ◽  
Wafer Level ◽  
Wafer Level Transfer
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