Sensitivity Enhancement in Vacuum Packaged Resonant MEMS Strain Sensors with On-Chip Strain Amplification Mechanism

Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but amplitude modulated accelerometers tend to be unstable under such conditions and therefore cannot be integrated in the same package. Herewith, a device composed by double-ended tuning fork resonators (DETF) and a force amplification mechanism for sensitivity enhancement is presented. Characterization of the fabricated devices was performed, and the design was successfully validated. A sensitivity close to 80 Hz/g was experimentally measured and the DETF characterization for different driving (AC) and bias voltages (DC) is also presented.

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Resonant pressure sensor with on-chip temperature and strain sensors for error correction

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2013.6474172 ◽

2013 ◽

Cited By ~ 9

Author(s):

Chia-Fang Chiang ◽

Andrew B. Graham ◽

Brian J. Lee ◽

Chae Hyuck Ahn ◽

Eldwin J. Ng ◽

...

Keyword(s):

Error Correction ◽

Pressure Sensor ◽

Strain Sensors ◽

Chip Temperature ◽

On Chip

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SAW strain sensors - high precision strain sensitivity investigation on chip-level

2013 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2013.0495 ◽

2013 ◽

Cited By ~ 3

Author(s):

Jochen Hempel ◽

Dominik Finke ◽

Matthias Steiert ◽

Roderich Zeiser ◽

Michael Berndt ◽

...

Keyword(s):

High Precision ◽

Strain Sensors ◽

Strain Sensitivity ◽

On Chip

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MetalMUMPs-Based Piezoresistive Strain Sensors for Integrated On-Chip Sensor Fusion

IEEE Sensors Journal ◽

10.1109/jsen.2014.2347971 ◽

2015 ◽

Vol 15 (1) ◽

pp. 568-578 ◽

Cited By ~ 4

Author(s):

Hossain Saboonchi ◽

Didem Ozevin

Keyword(s):

Sensor Fusion ◽

Strain Sensors ◽

On Chip

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Sensitivity enhancement for colorimetric glucose assays on whole blood by on-chip beam-guidance

Biomedical Microdevices ◽

10.1007/s10544-006-8172-x ◽

2006 ◽

Vol 8 (3) ◽

pp. 209-214 ◽

Cited By ~ 56

Author(s):

M. Grumann ◽

J. Steigert ◽

L. Riegger ◽

I. Moser ◽

B. Enderle ◽

...

Keyword(s):

Whole Blood ◽

Sensitivity Enhancement ◽

On Chip

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Compliant 3D frameworks instrumented with strain sensors for characterization of millimeter-scale engineered muscle tissues

Proceedings of the National Academy of Sciences ◽

10.1073/pnas.2100077118 ◽

2021 ◽

Vol 118 (19) ◽

pp. e2100077118

Author(s):

Hangbo Zhao ◽

Yongdeok Kim ◽

Heling Wang ◽

Xin Ning ◽

Chenkai Xu ◽

...

Keyword(s):

Disease Modeling ◽

Three Dimensional ◽

High Sensitivity ◽

Strain Sensors ◽

High Temporal Resolution ◽

On Chip ◽

Contractile Forces ◽

Traditional Approaches ◽

And Control

Tissue-on-chip systems represent promising platforms for monitoring and controlling tissue functions in vitro for various purposes in biomedical research. The two-dimensional (2D) layouts of these constructs constrain the types of interactions that can be studied and limit their relevance to three-dimensional (3D) tissues. The development of 3D electronic scaffolds and microphysiological devices with geometries and functions tailored to realistic 3D tissues has the potential to create important possibilities in advanced sensing and control. This study presents classes of compliant 3D frameworks that incorporate microscale strain sensors for high-sensitivity measurements of contractile forces of engineered optogenetic muscle tissue rings, supported by quantitative simulations. Compared with traditional approaches based on optical microscopy, these 3D mechanical frameworks and sensing systems can measure not only motions but also contractile forces with high accuracy and high temporal resolution. Results of active tension force measurements of engineered muscle rings under different stimulation conditions in long-term monitoring settings for over 5 wk and in response to various chemical and drug doses demonstrate the utility of such platforms in sensing and modulation of muscle and other tissues. Possibilities for applications range from drug screening and disease modeling to biohybrid robotic engineering.

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Clip-to-release on amplification (CRoA): a novel DNA amplification enhancer on and off microfluidics

Lab on a Chip ◽

10.1039/d0lc00318b ◽

2020 ◽

Vol 20 (11) ◽

pp. 1928-1938

Author(s):

Ren Shen ◽

Yanwei Jia ◽

Pui-In Mak ◽

Rui P. Martins

Keyword(s):

False Negative ◽

Dna Amplification ◽

Fluorescence Signal ◽

Negative Results ◽

False Negative Results ◽

Amplification Mechanism ◽

On Chip

A proposed DNA amplification enhancer with a “clip-to-release on amplification” mechanism reduces dye-mediated inhibition to amplification, increases fluorescence signal up to 10-fold, and eliminates false-negative results for on-chip PCR.

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