ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Correlation between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and Its Application to Quality Control
IEEE Transactions on Semiconductor Manufacturing
◽
10.1109/tsm.2021.3081261
◽
2021
◽
pp. 1-1
Author(s):
Hiroaki Kato
◽
Toshifumi Nishiguchi
◽
Saya Shimomura
◽
Katsura Miyashita
◽
Kenya Kobayashi
Keyword(s):
Quality Control
◽
Power Mosfets
◽
Field Plate
Download Full-text
Related Documents
Cited By
References
Quality Control of Trench Field Plate Power MOSFETs by Correlation of Trench Angle and Wafer Warpage
2020 International Symposium on Semiconductor Manufacturing (ISSM)
◽
10.1109/issm51728.2020.9377512
◽
2020
◽
Author(s):
Hiroaki Kato
◽
Toshifumi Nishiguchi
◽
Saya Shimomura
◽
Katsura Miyashita
◽
Kenya Kobayashi
Keyword(s):
Quality Control
◽
Power Mosfets
◽
Field Plate
Download Full-text
Narrow Gate Trench Power MOSFETs with Stepped Field Plate and Polysilicon Bridge
2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)
◽
10.1109/icsict49897.2020.9278189
◽
2020
◽
Author(s):
Zhengkang Wang
◽
Ming Qiao
◽
Ruidi Wang
◽
Zhaoji Li
◽
Bo Zhang
Keyword(s):
Power Mosfets
◽
Field Plate
Download Full-text
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs
IEEE Transactions on Semiconductor Manufacturing
◽
10.1109/tsm.2021.3073781
◽
2021
◽
pp. 1-1
Author(s):
Kota Tomita
◽
Tatsuya Shiraishi
◽
Hiroaki Kato
◽
Hiroyuki Kishimoto
◽
Katsura Miyashita
◽
...
Keyword(s):
Process Integration
◽
Power Mosfets
◽
Field Plate
◽
New Process
◽
Doped Silicon
◽
Phosphorus Doped
Download Full-text
Process Optimization of Trench Field Plate Power MOSFETs with Sequential Phosphorus-Doped Silicon
2020 International Symposium on Semiconductor Manufacturing (ISSM)
◽
10.1109/issm51728.2020.9377528
◽
2020
◽
Author(s):
Kota Tomita
◽
Tatsuya Shiraishi
◽
Hiroaki Kato
◽
Hiroyuki Kishimoto
◽
Katsura Miyashita
◽
...
Keyword(s):
Process Optimization
◽
Power Mosfets
◽
Field Plate
◽
Doped Silicon
◽
Phosphorus Doped
Download Full-text
A Design direction of low-voltage field-plate power MOSFETs for figure-of-merit (FOM) limit
Japanese Journal of Applied Physics
◽
10.35848/1347-4065/abe801
◽
2021
◽
Author(s):
Taichi Ogawa
◽
wataru saito
◽
Shin-ichi NISHIZAWA
Keyword(s):
Figure Of Merit
◽
Low Voltage
◽
Power Mosfets
◽
Field Plate
Download Full-text
On-Resistance Limit Estimation of 100 V-class Field-Plate Trench Power MOSFETs Optimized Oxide Thickness
IEEE Electron Device Letters
◽
10.1109/led.2020.3000239
◽
2020
◽
Vol 41
(7)
◽
pp. 1063-1065
Author(s):
Taichi Ogawa
◽
Wataru Saito
◽
Shin-Ichi Nishizawa
Keyword(s):
Oxide Thickness
◽
Power Mosfets
◽
Class Field
◽
Field Plate
Download Full-text
Floating Body Ring Termination for Trench Field Plate Power MOSFETs
2020 32nd International Symposium on Power Semiconductor Devices and ICs (ISPSD)
◽
10.1109/ispsd46842.2020.9170111
◽
2020
◽
Author(s):
Tanuj Saxena
◽
Vishnu Khemka
◽
Bernhard Grote
◽
Ganming Qin
◽
Moaniss Zitouni
Keyword(s):
Floating Body
◽
Power Mosfets
◽
Field Plate
Download Full-text
Gate drive techniques of Gate-connected Trench Field Plate Power MOSFETs to reduce both switching and conduction losses
2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD)
◽
10.23919/ispsd50666.2021.9452278
◽
2021
◽
Author(s):
Tatsuya Nishiwaki
◽
Tsuyoshi Kachi
◽
Yusuke Kawaguchi
◽
Shinichi Umekawa
Keyword(s):
Power Mosfets
◽
Field Plate
Download Full-text
Integrated Termination Ballast to Mitigate Avalanche Hotspots in Trench Field Plate Power MOSFETs
2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD)
◽
10.23919/ispsd50666.2021.9452312
◽
2021
◽
Author(s):
Tanuj Saxena
◽
Christian Torrent
◽
Vishnu Khemka
◽
Ganming Qin
◽
Moaniss Zitouni
Keyword(s):
Power Mosfets
◽
Field Plate
Download Full-text
The role of the ubiquitin–proteasome system in ER quality control
Essays in Biochemistry
◽
10.1042/eb0410099
◽
2005
◽
Vol 41
(1)
◽
pp. 99
◽
Cited By ~ 10
Author(s):
Yihong Ye
Keyword(s):
Quality Control
◽
Ubiquitin Proteasome System
◽
Er Quality Control
◽
Ubiquitin Proteasome
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close