Accurate characterization of SiO2 thin films using surface acoustic waves

2015 ◽  
Vol 62 (4) ◽  
pp. 736-743 ◽  
Author(s):  
Matthias Knapp ◽  
Alexey M. Lomonosov ◽  
Paul Warkentin ◽  
Philipp M. Jager ◽  
Werner Ruile ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Waves ◽  
Surface Acoustic Waves

Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

1975 ◽  
Vol 33 ◽  
pp. 86-87
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn
Keyword(s):  
Integrated Circuit ◽  
Acoustic Waves ◽  
New Technology ◽  
Surface Acoustic Waves ◽  
Electromechanical Properties ◽  
Leading Role ◽  
Saw Devices ◽  
Transmission Electron ◽  
High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

scholarly journals Double flow reversal in thin liquid films driven by megahertz-order surface vibration

2014 ◽  
Vol 470 (2169) ◽  
pp. 20130765 ◽  
Author(s):  
Amgad R. Rezk ◽  
Ofer Manor ◽  
Leslie Y. Yeo ◽  
James R. Friend
Keyword(s):  
Thin Films ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Intermolecular Forces ◽  
Liquid Films ◽  
Thin Liquid Films ◽  
Propagation Direction ◽  
Flow Reversal ◽  
Order Surface ◽  
Over Time

Arising from an interplay between capillary, acoustic and intermolecular forces, surface acoustic waves (SAWs) are observed to drive a unique and curious double flow reversal in the spreading of thin films. With a thickness at or less than the submicrometre viscous penetration depth, the film is seen to advance along the SAW propagation direction, and self-similarly over time t 1/4 in the inertial limit. At intermediate film thicknesses, beyond one-fourth the sound wavelength λ ℓ in the liquid, the spreading direction reverses, and the film propagates against the direction of the SAW propagation. The film reverses yet again, once its depth is further increased beyond one SAW wavelength. An unstable thickness region, between λ ℓ /8 and λ ℓ /4, exists from which regions of the film either rapidly grow in thickness to exceed λ ℓ /4 and move against the SAW propagation, consistent with the intermediate thickness films, whereas other regions decrease in thickness below λ ℓ /8 to conserve mass and move along the SAW propagation direction, consistent with the thin submicrometre films.

scholarly journals Highly Sensitive Surface Acoustic Wave Magnetic Field Sensor Using Multilayered TbCo2/FeCo Thin Film

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 902 ◽  
Author(s):  
Aurelien Mazzamurro ◽  
Abdelkrim Talbi ◽  
Yannick Dusch ◽  
Omar Elmazria ◽  
Philippe Pernod ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Magnetic Field Sensor ◽  
Nanostructured Thin Film ◽  
Highly Sensitive ◽  
Magnetic Model ◽  
Field Sensor

Over the last decades, the use of Surface Acoustic Waves (SAW) has emerged as a promising technology in many applications such as filters, signal processing but also sensors. We report the fabrication and the characterization of a SAW delay line magnetic field sensor using uniaxial multi-layered 14×[TbCo2(3.7nm)/FeCo(4nm)] nanostructured thin film deposited on Y36° Lithium Niobate (Figure 1a). The sensor shows an interesting dependency to a tunable bias magnetic field with different orientations relative to the easy axis. The obtained results are well explained using an equivalent piezo-magnetic model described in a previous work.

Microfluidic pumps employing surface acoustic waves generated in ZnO thin films

2009 ◽  
Vol 105 (2) ◽  
pp. 024508 ◽  
Author(s):  
X. Y. Du ◽  
Y. Q. Fu ◽  
J. K. Luo ◽  
A. J. Flewitt ◽  
W. I. Milne
Keyword(s):  
Thin Films ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Zno Thin Films

scholarly journals Elastic Constants of Diamond-Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 593 ◽  
Author(s):  
A.C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M.G. Beghi ◽  
C.E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

ABSTRACTThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

scholarly journals LASER-INDUCED SURFACE ACOUSTIC WAVES FOR THIN FILM CHARACTERIZATION

2020 ◽  
Vol 27 ◽  
pp. 57-61
Author(s):  
Radim Kudělka ◽  
Lukáš Václavek ◽  
Jan Tomáštík ◽  
Sabina Malecová ◽  
Radim Čtvrtlík
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Surface Acoustic Waves ◽  
Laser Pulses ◽  
Data Application ◽  
Thin Film Characterization ◽  
Short Laser Pulses

Knowledge of mechanical properties of thin films is essential for most of their applications. However, their determination can be problematic for very thin films. LAW (Laser-induced acoustic waves) is a combined acousto-optic method capable of measuring films with thickness from few nanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detected by a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film and the substrate as well as film thickness can be explored.Results from the LAW method are successfully compared with nanoindentation for Young’s modulus evaluation and with optical method for film thickness evaluation and also with literature data. Application of LAW for anisotropy mapping of materials with cubic crystallographic lattice is also demonstrated.

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