High-Temperature Piezoelectric Crystals for Acoustic Wave Sensor Applications

2016 ◽  
Vol 63 (3) ◽  
pp. 486-505 ◽  
Author(s):  
Hongfei Zu ◽  
Huiyan Wu ◽  
Qing-Ming Wang
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Piezoelectric Crystals ◽  
Sensor Applications ◽  
Acoustic Wave Sensor

scholarly journals Ir-Rh thin films as high-temperature electrodes for surface acoustic wave sensor applications

2016 ◽  
Vol 243 ◽  
pp. 35-42 ◽  
Author(s):  
Amine Taguett ◽  
Thierry Aubert ◽  
Marc Lomello ◽  
Ouarda Legrani ◽  
Omar Elmazria ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Sensor Applications ◽  
Acoustic Wave Sensor

scholarly journals Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Materials ◽  
2019 ◽  
Vol 12 (17) ◽  
pp. 2651 ◽  
Author(s):  
Siegfried B. Menzel ◽  
Marietta Seifert ◽  
Abhinav Priyadarshi ◽  
Gayatri K. Rane ◽  
Eunmi Park ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lanthanum Oxide ◽  
High Vacuum ◽  
High Temperature Stability ◽  
Multilayer Systems ◽  
Si Substrates ◽  
Acoustic Wave Sensor ◽  
Sensor Devices

Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La 2 O 3 ) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si substrates (SiO 2 /Si) to study the effect of lanthanum oxide on the electrical resistivity of molybdenum thin films and their high-temperature stability. The multilayer systems were deposited by the magnetron sputter deposition of extremely thin (≤1 nm) La interlayers in between adjacent Mo layers. After deposition of each La layer the process was interrupted for 25 to 60 min to oxidize the La using the residual oxygen in the high vacuum of the deposition chamber. The samples were annealed at 800 ∘ C in high vacuum for up to 120 h. In case of a 1 nm thick La interlayer in-between the Mo a continuous layer of La 2 O 3 is formed. For thinner La layers an interlayer between adjacent Mo layers is observed consisting of a (La 2 O 3 -Mo) mixed structure of molybdenum and nm-sized lanthanum oxide particles. Measurements show that the (Mo-La 2 O 3 ) multilayer systems on SiO 2 /Si substrates are stable at least up to 800 ∘ C for 120 h in high vacuum conditions.

scholarly journals Fabrication of high temperature surface acoustic wave devices for sensor applications

2005 ◽  
Vol 123-124 ◽  
pp. 403-407 ◽  
Author(s):  
M.N. Hamidon ◽  
V. Skarda ◽  
N.M. White ◽  
F. Krispel ◽  
P. Krempl ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Sensor Applications ◽  
Acoustic Wave Devices ◽  
Temperature Surface

Investigation into surface acoustic wave sensor for DCM gas detection using COMSOL multiphysics

2021 ◽  
Vol 572 (1) ◽  
pp. 94-105
Author(s):  
Mohamed Moustafa ◽  
Ghaylen Laouini ◽  
Mostafa ElNaggar ◽  
Tariq AlZoubi
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Gas Detection ◽  
Comsol Multiphysics ◽  
Acoustic Wave Sensor

Highly precision carbon dioxide acoustic wave sensor with minimized humidity interference

2021 ◽  
pp. 129824
Author(s):  
Jintao Pang ◽  
Xianhao Le ◽  
Kai Pang ◽  
Hanyong Dong ◽  
Qian Zhang ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Acoustic Wave ◽  
Acoustic Wave Sensor
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