Hydrothermally deposited PZT thin film vibration probe sensor

2003 ◽  
Author(s):  
M. Sasaki ◽  
T. Kanda ◽  
M.K. Kurosawa ◽  
T. Higuchi
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Probe Sensor

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Ultrasonics ◽  
2002 ◽  
Vol 40 (1-8) ◽  
pp. 61-65 ◽  
Author(s):  
Takefumi Kanda ◽  
Minoru K. Kurosawa ◽  
Toshiro Higuchi
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Probe Sensor ◽  
Touch Probe

A flat type touch probe sensor using PZT thin film vibrator

2000 ◽  
Vol 83 (1-3) ◽  
pp. 67-75 ◽  
Author(s):  
T. Kanda ◽  
T. Morita ◽  
M.K. Kurosawa ◽  
T. Higuchi
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Flat Type ◽  
Probe Sensor ◽  
Touch Probe

A Longitudinally Vibrating Touch Probe Sensor Using PZT Thin Film Vibrator

2001 ◽  
pp. 1054-1057
Author(s):  
Takefumi Kanda ◽  
Minoru K. Kurosawa ◽  
Toshiro Higuchi
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Probe Sensor ◽  
Touch Probe

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Piezoelectric PZT thin-film transformers with a ring–dot structure

2020 ◽  
Vol 59 (SP) ◽  
pp. SPPD09
Author(s):  
Sang-Hyo Kweon ◽  
Kazuki Tani ◽  
Kensuke Kanda ◽  
Sahn Nahm ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Pzt Thin Film

Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

2009 ◽  
Vol 421-422 ◽  
pp. 95-98
Author(s):  
Tsuyoshi Aoki ◽  
Shigeyoshi Umemiya ◽  
Masaharu Hida ◽  
Kazuaki Kurihara
Keyword(s):  
Thin Film ◽  
Fem Analysis ◽  
Active Part ◽  
Piezoelectric Response ◽  
Small Displacement ◽  
Shear Mode ◽  
Mems Devices ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Piezoelectric Constants

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors

2001 ◽  
Vol 92 (1-3) ◽  
pp. 156-160 ◽  
Author(s):  
Korbinian Kunz ◽  
Peter Enoksson ◽  
Göran Stemme
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Highly Sensitive
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