High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition

2012 ◽  
Vol 95 (9) ◽  
pp. 2782-2784 ◽  
Author(s):  
Song Zhang ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Film

High‐speed laser chemical vapor deposition of copper: A search for optimum conditions

1989 ◽  
Vol 65 (6) ◽  
pp. 2470-2474 ◽  
Author(s):  
B. Markwalder ◽  
M. Widmer ◽  
D. Braichotte ◽  
H. van den Bergh
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Optimum Conditions ◽  
Laser Chemical Vapor Deposition

High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition

2013 ◽  
Vol 97 (3) ◽  
pp. 952-958 ◽  
Author(s):  
Song Zhang ◽  
Qingfang Xu ◽  
Rong Tu ◽  
Takashi Goto ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films
Sign in / Sign up

Export Citation Format

Share Document