Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling

2010 ◽  
Vol 132 (3) ◽  
Author(s):  
F. Marinello ◽  
S. Carmignato ◽  
A. Voltan ◽  
E. Savio ◽  
L. De Chiffre
Keyword(s):  
Mathematical Model ◽  
Atomic Force Microscopy ◽  
Scanning System ◽  
Thermal Drift ◽  
Scaling Effects ◽  
Error Sources ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Squareness Errors

This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating.

Development of a comprehensive metrology platform dedicated to dimensional measurements of CD atomic force microscopy tips

2015 ◽  
Author(s):  
Johann Foucher ◽  
Sebastian W. Schmidt ◽  
Aurelien Labrosse ◽  
Alexandre Dervillé ◽  
Sandra Bos ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements

scholarly journals Evaluation of preparation methods for suspended nano-objects on substrates for dimensional measurements by atomic force microscopy

2017 ◽  
Vol 8 ◽  
pp. 1774-1785
Author(s):  
Petra Fiala ◽  
Daniel Göhler ◽  
Benno Wessely ◽  
Michael Stintz ◽  
Giovanni Mattia Lazzerini ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Membrane Filtration ◽  
Dip Coating ◽  
Preparation Methods ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Drop Drying ◽  
Particle Preparation ◽  
Specific Particle

Dimensional measurements on nano-objects by atomic force microscopy (AFM) require samples of safely fixed and well individualized particles with a suitable surface-specific particle number on flat and clean substrates. Several known and proven particle preparation methods, i.e., membrane filtration, drying, rinsing, dip coating as well as electrostatic and thermal precipitation, were performed by means of scanning electron microscopy to examine their suitability for preparing samples for dimensional AFM measurements. Different suspensions of nano-objects (with varying material, size and shape) stabilized in aqueous solutions were prepared therefore on different flat substrates. The drop-drying method was found to be the most suitable one for the analysed suspensions, because it does not require expensive dedicated equipment and led to a uniform local distribution of individualized nano-objects. Traceable AFM measurements based on Si and SiO2 coated substrates confirmed the suitability of this technique.

scholarly journals Calculation of the effect of tip geometry on noncontact atomic force microscopy using a qPlus sensor

2013 ◽  
Vol 4 ◽  
pp. 10-19 ◽  
Author(s):  
Julian Stirling ◽  
Gordon A Shaw
Keyword(s):  
Mathematical Model ◽  
Atomic Force Microscopy ◽  
Dynamic Properties ◽  
Force Spectroscopy ◽  
Lateral Component ◽  
Force Microscopy ◽  
Atomic Force

In qPlus atomic force microscopy the tip length can in principle approach the length of the cantilever. We present a detailed mathematical model of the effects this has on the dynamic properties of the qPlus sensor. The resulting, experimentally confirmed motion of the tip apex is shown to have a large lateral component, raising interesting questions for both calibration and force-spectroscopy measurements.

scholarly journals Feedback-induced instability in tapping mode atomic force microscopy: theory and experiment

2010 ◽  
Vol 467 (2130) ◽  
pp. 1801-1822 ◽  
Author(s):  
O. Payton ◽  
A. R. Champneys ◽  
M. E. Homer ◽  
L. Picco ◽  
M. J. Miles
Keyword(s):  
Mathematical Model ◽  
Atomic Force Microscopy ◽  
Driving Frequency ◽  
Integral Control ◽  
Tapping Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Flat Sample ◽  
Realistic Representation ◽  
Mode Atomic Force Microscopy

We investigate a mathematical model of tapping mode atomic force microscopy (AFM), which includes surface interaction via both van der Waals and meniscus forces. We also take particular care to include a realistic representation of the integral control inherent to the real microscope. Varying driving amplitude, amplitude setpoint and driving frequency independently shows that the model can capture the qualitative features observed in AFM experiments on a flat sample and a calibration grid. In particular, the model predicts the onset of an instability, even on a flat sample, in which a large-amplitude beating-type motion is observed. Experimental results confirm this onset and also confirm the qualitative features of the dynamics suggested by the simulations. The simulations also suggest the mechanism behind the beating effect; that the control loop over-compensates for sufficiently high gains. The mathematical model is also used to offer recommendations on the effective use of AFMs in order to avoid unwanted artefacts.

scholarly journals Numerical Exploratory Analysis of Dynamics and Control of an Atomic Force Microscopy in Tapping Mode with Fractional Order

2020 ◽  
Vol 2020 ◽  
pp. 1-18
Author(s):  
Mauricio A. Ribeiro ◽  
Jose M. Balthazar ◽  
Wagner B. Lenz ◽  
Rodrigo T. Rocha ◽  
Angelo M. Tusset
Keyword(s):  
Mathematical Model ◽  
Atomic Force Microscopy ◽  
Feedback Control ◽  
Fractional Order ◽  
Delayed Feedback Control ◽  
Linear Feedback ◽  
Tapping Mode ◽  
Force Microscopy ◽  
Control Techniques ◽  
Atomic Force

In this paper, we investigate the mechanism of atomic force microscopy in tapping mode (AFM-TM) under the Casimir and van der Waals (VdW) forces. The dynamic behavior of the system is analyzed through a nonlinear dimensionless mathematical model. Numerical tools as Poincaré maps, Lyapunov exponents, and bifurcation diagrams are accounted for the analysis of the system. With that, the regions in which the system presents chaotic and periodic behaviors are obtained and investigated. Moreover, the fractional calculus is introduced into the mathematical model, employing the Riemann-Liouville kernel discretization in the viscoelastic term of the system. The 0-1 test is implemented to analyze the new dynamics of the system, allowing the identification of the chaotic and periodic regimes of the AFM system. The dynamic results of the conventional (integer derivative) and fractional models reveal the need for the application of control techniques such as Optimum Linear Feedback Control (OLFC), State-Dependent Riccati Equations (SDRE) by using feedback control, and the Time-Delayed Feedback Control. The results of the control techniques are efficient with and without the fractional-order derivative.

Large Scanning Range and Rapid AFM for Biological Cell Topography Imaging

2013 ◽  
Vol 562-565 ◽  
pp. 697-700 ◽  
Author(s):  
Bo Hua Yin ◽  
Dai Xie Chen ◽  
Yun Sheng Lin ◽  
Ying Ying Gao ◽  
Han Li ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Image Method ◽  
Scanning System ◽  
Spatial Displacement ◽  
Nonlinearity Error ◽  
Force Microscopy ◽  
Atomic Force ◽  
Flexure Guide ◽  
Scanning Range ◽  
Scanning Motion

The small spatial displacement of the piezo tube scanner limits the AFM(Atomic Force Microscopy) scanning range, especially when facing up to cell topography scanning. And the low dynamic property of normal AFM tube scanner tube restricts the imaging speed. In order to achieve large scanning range and rapid scanning motion simultaneously, a special atomic force microscopy is designed. The 100um scanning range is obtained by the new scanner which is composed of the flexure guide structure instead of peizo tube. Furthermore, a new acquiring image method is used to eliminating AFM nonlinearity error. Using this scanning system, some large biological cells are imaged in liquid environments with 30 lines per second.

Sign in / Sign up

Export Citation Format

Share Document