Machine Learning Augmentation in Micro-Sensor Assemblies

Author(s):  
Mohammad H. Hasan ◽  
Fadi Alsaleem ◽  
Amin Abbasalipour ◽  
Siavash Pourkamali Anaraki ◽  
Muhammad Emad-Un-Din ◽  
...  

Abstract The size and power limitations in small electronic systems such as wearable devices limit their potential. Significant energy is lost utilizing current computational schemes in processes such as analog-to-digital conversion and wireless communication for cloud computing. Edge computing, where information is processed near the data sources, was shown to significantly enhance the performance of computational systems and reduce their power consumption. In this work, we push computation directly into the sensory node by presenting the use of an array of electrostatic Microelectromechanical systems (MEMS) sensors to perform colocalized sensing-and-computing. The MEMS network is operated around the pull-in regime to access the instability jump and the hysteresis available in this regime. Within this regime, the MEMS network is capable of emulating the response of the continuous-time recurrent neural network (CTRNN) computational scheme. The network is shown to be successful at classifying a quasi-static input acceleration waveform into square or triangle signals in the absence of digital processors. Our results show that the MEMS may be a viable solution for edge computing implementation without the need for digital electronics or micro-processors. Moreover, our results can be used as a basis for the development of new types of specialized MEMS sensors (ex: gesture recognition sensors).

Author(s):  
Neha Jain ◽  
Nir Shlezinger ◽  
Yonina C. Eldar ◽  
Anubha Gupta ◽  
Vivek Ashok Bohara

2021 ◽  
Vol 32 (3) ◽  
Author(s):  
Ruo-Shi Dong ◽  
Lei Zhao ◽  
Jia-Jun Qin ◽  
Wen-Tao Zhong ◽  
Yi-Chun Fan ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.


1993 ◽  
Vol 7 (4) ◽  
pp. 408 ◽  
Author(s):  
James R. Matey ◽  
M.J. Lauterbach

2017 ◽  
Author(s):  
Evgenii S. Kolodeznyi ◽  
Innokenty I. Novikov ◽  
Andrey V. Babichev ◽  
Alexander S. Kurochkin ◽  
Andrey G. Gladyshev ◽  
...  

2021 ◽  
pp. 127440
Author(s):  
Hao Chi ◽  
Qiulin Zhang ◽  
Shuna Yang ◽  
Bo Yang ◽  
Yanrong Zhai ◽  
...  

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