Dynamic Characteristics Analysis of a Silicon Pressure Sensor Using Network Methods

This paper presents a method to describe electromechanical systems with an equivalent network description for an early investigation of the dynamical behavior during the design process. The procedure using equivalent circuits modeling for system description is outlined with an example of characterizing a silicon pressure sensor for a first analysis of its transmission behavior. Therefore, the sensor is separated into acoustic and mechanical systems of the casing and electromechanical systems of the silicon element. Friction, compliance and mass of the diaphragm for the pressure application are modeled in the mechanical domain using the equivalent electrical symbols of resistance, inductance and capacity. The pressure transmission with a filling fluid in a canal is modeled using acoustic parameters. The solution of the transfer function enables an analysis of the amplitude frequency response between the acoustic, mechanical and electric systems of the sensor. A first comparison between simulation and measurement results shows a correlation in the pressure transfer function of the silicon sensor.