Plasma etching endpoint detection using multiple wavelengths for small open-area wafers

2001 ◽  
Vol 19 (1) ◽  
pp. 66-75 ◽  
Author(s):  
H. Henry Yue ◽  
S. Joe Qin ◽  
Joseph Wiseman ◽  
Anthony Toprac
Keyword(s):  
Plasma Etching ◽  
Endpoint Detection ◽  
Open Area ◽  
Multiple Wavelengths

Endpoint Detection in Low Open Area Ratio Plasma Etching Using Hybrid Method

2019 ◽  
Vol 44 (1) ◽  
pp. 1081-1086
Author(s):  
Seung-Gyun Kim ◽  
Sung-Ik Jeon ◽  
Yi-Seul Han ◽  
Sung-Hwan Shin ◽  
Sang-Jeen Hong ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Hybrid Method ◽  
Area Ratio ◽  
Endpoint Detection ◽  
Open Area

Optical endpoint detection of plasma etching and RIE for LSI circuits

1994 ◽  
Author(s):  
Baoyong Mi ◽  
Kefei Song ◽  
De-Fu Hao ◽  
Qingying Zhang
Keyword(s):  
Plasma Etching ◽  
Endpoint Detection

Endpoint Detection in Plasma Etching Using Principal Component Analysis and Expanded Hidden Markov Model

2019 ◽  
Vol 34 (1) ◽  
pp. 943-948 ◽  
Author(s):  
Min-Woo Kim ◽  
Seung-Gyun Kim ◽  
ShuKun Zhao ◽  
Sang Jeen Hong ◽  
Seung-Soo Han
Keyword(s):  
Principal Component Analysis ◽  
Markov Model ◽  
Hidden Markov Model ◽  
Plasma Etching ◽  
Hidden Markov ◽  
Principal Component ◽  
Component Analysis ◽  
Endpoint Detection

Endpoint detection in plasma etching

1985 ◽  
Vol 3 (3) ◽  
pp. 631-636 ◽  
Author(s):  
James P. Roland ◽  
Paul. J. Marcoux ◽  
Gary W. Ray ◽  
Glenn H. Rankin
Keyword(s):  
Plasma Etching ◽  
Endpoint Detection

Electrical endpoint detection of VLSI contact plasma etching

1984 ◽  
Vol 5 (12) ◽  
pp. 514-517 ◽  
Author(s):  
G. Chang ◽  
J.P. McVittie ◽  
J.T. Walker ◽  
R.W. Dutton
Keyword(s):  
Plasma Etching ◽  
Endpoint Detection

Endpoint Detection in Low Open Area TSV Fabrication Using Optical Emission Spectroscopy

2014 ◽  
Vol 4 (7) ◽  
pp. 1251-1260 ◽  
Author(s):  
Ja Myung Gu ◽  
Paragkumar A. Thadesar ◽  
Ashish Dembla ◽  
Muhannad S. Bakir ◽  
Gary S. May ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Endpoint Detection ◽  
Open Area
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