Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Seigou Takashima; Shigeo Arai; Masaru Hori; Toshio Goto; Akihiro Kono; Masafumi Ito; Katsumi Yoneda

doi:10.1116/1.1340655

Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1340655 ◽

2001 ◽

Vol 19 (2) ◽

pp. 599-602 ◽

Cited By ~ 56

Author(s):

Seigou Takashima ◽

Shigeo Arai ◽

Masaru Hori ◽

Toshio Goto ◽

Akihiro Kono ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Nitrogen Molecule ◽

Ultraviolet Absorption ◽

Spectroscopy Technique ◽

Density Measurements ◽

Hollow Cathode Lamp ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Applied Physics Letters ◽

10.1063/1.125497 ◽

1999 ◽

Vol 75 (25) ◽

pp. 3929-3931 ◽

Cited By ~ 111

Author(s):

Seigou Takashima ◽

Masaru Hori ◽

Toshio Goto ◽

Akihiro Kono ◽

Masafumi Ito ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Hydrogen Atoms ◽

Density Measurements ◽

Hollow Cathode Lamp ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

Applied Physics Letters ◽

10.1063/1.118582 ◽

1997 ◽

Vol 70 (11) ◽

pp. 1375-1377 ◽

Cited By ~ 21

Author(s):

K. Sasaki ◽

Y. Kawai ◽

K. Kadota

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Density Measurements ◽

Fluorocarbon Plasmas ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

Review of Scientific Instruments ◽

10.1063/1.1582386 ◽

2003 ◽

Vol 74 (7) ◽

pp. 3453-3459 ◽

Cited By ~ 63

Author(s):

Hisao Nagai ◽

Mineo Hiramatsu ◽

Masaru Hori ◽

Toshio Goto

Keyword(s):

Oxygen Atom ◽

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Hollow Cathode Lamp ◽

Ultraviolet Absorption Spectroscopy

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Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

Journal of Applied Physics ◽

10.1063/1.3091279 ◽

2009 ◽

Vol 105 (11) ◽

pp. 113305 ◽

Cited By ~ 36

Author(s):

Wakana Takeuchi ◽

Hajime Sasaki ◽

Satoru Kato ◽

Seigo Takashima ◽

Mineo Hiramatsu ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Measurement Technique ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Sheet Material ◽

Ultraviolet Absorption ◽

Hollow Cathode Lamp ◽

Ultraviolet Absorption Spectroscopy ◽

Material Formation

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Formation and Diagnostics of Plasmas and Radicals. Measurement of Absolute Density of Atomic Species Using Vacuum Ultraviolet Absorption Spectroscopy with Microdischage Lamp.

Shinku ◽

10.3131/jvsj.44.802 ◽

2001 ◽

Vol 44 (9) ◽

pp. 802-807

Author(s):

Seigou TAKASHIMA ◽

Masaru HORI ◽

Toshio GOTO

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy ◽

Atomic Species

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Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy

Current Applied Physics ◽

10.1016/j.cap.2020.02.001 ◽

2020 ◽

Vol 20 (4) ◽

pp. 550-556 ◽

Cited By ~ 1

Author(s):

Deog Gyun Cho ◽

Jonggu Han ◽

Duksun Han ◽

Se Youn Moon

Keyword(s):

Hydrogen Atom ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Density Measurement ◽

Ultraviolet Absorption ◽

Inductively Coupled ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Predissociation supported high‐resolution vacuum ultraviolet absorption spectroscopy of excited electronic states of NH3

The Journal of Chemical Physics ◽

10.1063/1.467341 ◽

1994 ◽

Vol 101 (7) ◽

pp. 5523-5528 ◽

Cited By ~ 15

Author(s):

Xinghua Li ◽

Carl Rudolf Vidal

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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ChemInform Abstract: Predissociation Supported High-Resolution Vacuum Ultraviolet Absorption Spectroscopy of Excited Electronic States of NH3.

ChemInform ◽

10.1002/chin.199503006 ◽

2010 ◽

Vol 26 (3) ◽

pp. no-no

Author(s):

X. LI ◽

C. R. VIDAL

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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PH3Concentration Measurements by Vacuum Ultraviolet Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.19.779 ◽

1980 ◽

Vol 19 (4) ◽

pp. 779-780 ◽

Cited By ~ 2

Author(s):

Noriaki Honma ◽

Isao Sugaya ◽

Katsumi Takami

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Ultraviolet Absorption Spectroscopy

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Test Method for Determination of Saturated Hydrocarbon, Aromatic, and Diaromatic Content of Aviation Turbine Fuels Using Gas Chromatography with Vacuum Ultraviolet Absorption Spectroscopy Detection (GC-VUV)

10.1520/d8267-19a ◽

2019 ◽

Author(s):

Keyword(s):

Gas Chromatography ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Saturated Hydrocarbon ◽

Ultraviolet Absorption ◽

Test Method ◽

Ultraviolet Absorption Spectroscopy

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