Deposited well-crystallized cubic boron nitride films by pulsed plasma enhanced chemical vapor deposition at room temperature

2001 ◽  
Vol 19 (5) ◽  
pp. 2312-2314
Author(s):  
P. X. Yan ◽  
H. Y. Yu ◽  
Z. G. Wu ◽  
J. W. Xu ◽  
X. L. Wen
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Room Temperature ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Pulsed Plasma ◽  
Boron Nitride Films

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.

ChemInform ◽  
2007 ◽  
Vol 38 (2) ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition

2006 ◽  
Vol 110 (42) ◽  
pp. 21073-21076 ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of
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