High-throughput electron-beam lithography with a raster-scanned, variably shaped beam
2001 ◽
Vol 19
(6)
◽
pp. 2455
◽
2016 ◽
Vol 15
(3)
◽
pp. 031606
◽
Keyword(s):
Keyword(s):
1997 ◽
Vol 15
(6)
◽
pp. 2707
◽
2014 ◽
Vol 2014.20
(0)
◽
pp. _21120-1_-_21120-2_
Keyword(s):
2015 ◽
Vol 133
◽
pp. 23-35
◽
Keyword(s):
Keyword(s):