We describe the fabrication of lead zirconate titanate (PZT) nanodisc arrays isolated by a polymer layer and contacted with a top electrode. PZT thin films were deposited by multitarget sputtering onto a platinum/titanium bottom electrode and structured by means of nanosphere lithography. To guarantee short-circuit-free deposition of a top electrode, the space between the nanostructures was filled by a polymer. Two approaches for the filling are demonstrated: (a) imprinting and (b) skim coating. Single nanodiscs embedded in a flexible
polymer matrix have two major advantages. First, taking into account the flexibility of the matrix, they can vibrate in lateral direction and, second, due to shrinking to the nanoscale, predominant directions of the polarization form, such as vortex- or bubble-like domain patterns. Piezoresponse force microscopy was performed on patterned and nonpatterned samples with and without a top electrode to check the local piezoresponse. Comparison of the different samples revealed an increase in lateral piezoactivity for patterned samples with Ni/Cr electrode while the out-of-plane piezoresponse remained constant. Gold electrodes limit the piezoresponse in both measured directions.
Connected Lead Zirconate Titanate Nanodot Arrays for Perspective Functional Materials