Secondary ion mass spectrometry depth profiling of amorphous polymer multilayers using O2+ and Cs+ ion bombardment with a magnetic sector instrument

2006 ◽  
Vol 24 (2) ◽  
pp. 362-368 ◽  
Author(s):  
S. E. Harton ◽  
F. A. Stevie ◽  
H. Ade
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Amorphous Polymer ◽  
Depth Profiling ◽  
Ion Bombardment ◽  
Magnetic Sector ◽  
Magnetic Sector Instrument ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Sector Instrument

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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