Electrical properties of fluorine-doped silicon-oxycarbide dielectric barrier for copper interconnect

2006 ◽  
Vol 24 (6) ◽  
pp. 2621 ◽  
Author(s):  
Chun-Chieh Huang ◽  
Jow-Lay Huang ◽  
Ying-Lang Wang ◽  
Juin-Jie Chang
Keyword(s):  
Electrical Properties ◽  
Silicon Oxycarbide ◽  
Dielectric Barrier ◽  
Copper Interconnect ◽  
Doped Silicon

Nano-scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation

2021 ◽  
pp. 1-1
Author(s):  
Hung-Yuan Chang ◽  
Yew-Chung Sermon Wu ◽  
Chia-He Chang ◽  
Kun-Lin Lin ◽  
Abhijeet Joshi ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Shallow Junction ◽  
Depth Profiles ◽  
Nano Scale ◽  
Doped Silicon ◽  
Phosphorus Doped

Synthesis and luminescent properties of novel Eu2+-doped silicon oxycarbide glasses

2004 ◽  
Vol 24 (4) ◽  
pp. 601-605 ◽  
Author(s):  
Yujun Zhang ◽  
Alberto Quaranta ◽  
Gian Domenico Soraru
Keyword(s):  
Luminescent Properties ◽  
Silicon Oxycarbide ◽  
Doped Silicon ◽  
Silicon Oxycarbide Glasses

Dense nanosized europium silicate clusters induced light emission enhancement in Eu-doped silicon oxycarbide films

2017 ◽  
Vol 694 ◽  
pp. 946-951 ◽  
Author(s):  
Zhenxu Lin ◽  
Rui Huang ◽  
Huaipei Wang ◽  
Yan Wang ◽  
Yi Zhang ◽  
...  
Keyword(s):  
Light Emission ◽  
Silicon Oxycarbide ◽  
Emission Enhancement ◽  
Doped Silicon

Enhanced electromagnetic wave absorption of Fe‐doped silicon oxycarbide nanocomposites

2019 ◽  
Vol 103 (3) ◽  
pp. 1732-1743 ◽  
Author(s):  
Bin Du ◽  
Junjie Qian ◽  
Ping Hu ◽  
Chao He ◽  
Mei Cai ◽  
...  
Keyword(s):  
Electromagnetic Wave ◽  
Silicon Oxycarbide ◽  
Electromagnetic Wave Absorption ◽  
Wave Absorption ◽  
Doped Silicon
Sign in / Sign up

Export Citation Format

Share Document