Simple fabrication of UV nanoimprint templates using critical energy electron beam lithography
2007 ◽
Vol 25
(6)
◽
pp. 2407
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2001 ◽
Vol 57-58
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pp. 297-302
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2002 ◽
Vol 41
(Part 1, No. 6B)
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pp. 4157-4162
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2013 ◽
Vol 31
(1)
◽
pp. 011605
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Keyword(s):
1993 ◽
Vol 8
(7)
◽
pp. 1490-1492
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Keyword(s):
1987 ◽
Vol 26
(Part 2, No. 7)
◽
pp. L1165-L1167
Keyword(s):
2000 ◽
Vol 18
(6)
◽
pp. 3122
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Keyword(s):