Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4790364 ◽

2013 ◽

Vol 31 (2) ◽

pp. 020604 ◽

Author(s):

Melisa Brihoum ◽

Gilles Cunge ◽

Maxime Darnon ◽

David Gahan ◽

Olivier Joubert ◽

...

Keyword(s):

Distribution Function ◽

Ion Flux ◽

Inductively Coupled Plasmas ◽

Ion Distribution ◽

Inductively Coupled ◽

Coupled Plasmas

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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On the atomic state distribution function in inductively coupled plasmas—II

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(90)80078-w ◽

1990 ◽

Vol 45 (1-2) ◽

pp. 1-13 ◽

Author(s):

J.A.M. Van Der Mullen

Keyword(s):

Distribution Function ◽

Atomic State ◽

Inductively Coupled Plasmas ◽

State Distribution ◽

Inductively Coupled ◽

Coupled Plasmas

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On the atomic state distribution function in inductively coupled plasmas-III. Rate coefficients and properties of atomic states

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(90)80100-w ◽

1990 ◽

Vol 45 (3) ◽

pp. 233-247 ◽

Author(s):

J.A.M. Van Der Mullen ◽

D.C. Schram

Keyword(s):

Distribution Function ◽

Atomic State ◽

Rate Coefficients ◽

Inductively Coupled Plasmas ◽

State Distribution ◽

Inductively Coupled ◽

Coupled Plasmas ◽

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On the atomic state distribution function in inductively coupled plasmas—I. Thermodynamic equilibrium considered on the elementary level

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(89)80107-7 ◽

1989 ◽

Vol 44 (11) ◽

pp. 1067-1080 ◽

Author(s):

J.A.M. van der Mullen

Keyword(s):

Distribution Function ◽

Thermodynamic Equilibrium ◽

Atomic State ◽

Elementary Level ◽

Inductively Coupled Plasmas ◽

State Distribution ◽

Inductively Coupled ◽

Coupled Plasmas

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Two-dimensional ion flux distributions in inductively coupled plasmas: Effect of adding electronegative gases to Ar

Journal of Applied Physics ◽

10.1063/1.1517733 ◽

2002 ◽

Vol 92 (11) ◽

pp. 6444-6450 ◽

Author(s):

Tae Won Kim ◽

Eray S. Aydil

Keyword(s):

Ion Flux ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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An alternative distribution function for electrons in inductively coupled plasmas

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(90)80093-x ◽

1990 ◽

Vol 45 (1-2) ◽

pp. 215-218 ◽

Author(s):

T.M. Meadows ◽

H.B. Fannin

Keyword(s):

Distribution Function ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Alternative Distribution ◽

Coupled Plasmas

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Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas

IEEE Transactions on Plasma Science ◽

10.1109/tps.2003.815243 ◽

2003 ◽

Vol 31 (4) ◽

pp. 614-627 ◽

Author(s):

Tae Won Kim ◽

E.S. Aydil

Keyword(s):

Theoretical Study ◽

Ion Flux ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5133978 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022801

Author(s):

Ju-Ho Kim ◽

Deuk-Chul Kwon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Low Frequency Power ◽

Coupled Plasmas ◽

Frequency Power

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Control of the spatial distribution of ion flux in dual inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/5.0026248 ◽

2021 ◽

Vol 129 (10) ◽

pp. 103305

Author(s):

Sung-Won Cho ◽

Jun-Hyeon Moon ◽

Aixian Zhang ◽

Chin-Wook Chung

Keyword(s):

Spatial Distribution ◽

Ion Flux ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

Journal of Applied Physics ◽

10.1063/5.0023888 ◽

2020 ◽

Vol 128 (8) ◽

pp. 089901

Author(s):

Chenhui Qu ◽

Steven J. Lanham ◽

Steven C. Shannon ◽

Sang Ki Nam ◽

Mark J. Kushner

Keyword(s):

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Power Matching ◽

Coupled Plasmas

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