Fast spatial atomic layer deposition of Al2O3 at low temperature (<100 °C) as a gas permeation barrier for flexible organic light-emitting diode displays

2016 ◽  
Vol 34 (1) ◽  
pp. 01A121 ◽  
Author(s):  
Hagyoung Choi ◽  
Seokyoon Shin ◽  
Hyeongtag Jeon ◽  
Yeongtae Choi ◽  
Junghun Kim ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Light Emitting Diode ◽  
Atomic Layer ◽  
Gas Permeation ◽  
Light Emitting ◽  
Organic Light Emitting Diode ◽  
Organic Light ◽  
Layer Deposition

Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition

2016 ◽  
Vol 18 (2) ◽  
pp. 1042-1049 ◽  
Author(s):  
Lae Ho Kim ◽  
Yong Jin Jeong ◽  
Tae Kyu An ◽  
Seonuk Park ◽  
Jin Hyuk Jang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Shelf Life ◽  
Light Emitting Diode ◽  
Atomic Layer ◽  
Light Emitting ◽  
Organic Light Emitting Diode ◽  
Organic Light ◽  
Layer Deposition

The shelf-life of the OLED devices passivated with and without PEALD-based films at 60 °C and 90% RH.

scholarly journals Low-temperature atomic layer deposition of Al2O3/alucone nanolaminates for OLED encapsulation

RSC Advances ◽  
2019 ◽  
Vol 9 (36) ◽  
pp. 20884-20891 ◽  
Author(s):  
Guixiong Chen ◽  
Yalian Weng ◽  
Fan Sun ◽  
Xiongtu Zhou ◽  
Chaoxing Wu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Molecular Layer ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Organic Light Emitting Diodes ◽  
Molecular Layer Deposition ◽  
Light Emitting ◽  
Organic Light ◽  
Layer Deposition

Al2O3/alucone laminates were fabricated by atomic layer deposition (ALD) and molecular layer deposition (MLD), showing good barrier properties. These laminates were found to prolong the lifetime of organic light-emitting diodes (OLEDs) evidently.

Low-temperature gas-barrier films by atomic layer deposition for encapsulating organic light-emitting diodes

2016 ◽  
Vol 27 (29) ◽  
pp. 295706 ◽  
Author(s):  
Ming-Hung Tseng ◽  
Hui-Huan Yu ◽  
Kun-Yi Chou ◽  
Jwo-Huei Jou ◽  
Kung-Liang Lin ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Light Emitting Diodes ◽  
Atomic Layer ◽  
Organic Light Emitting Diodes ◽  
Gas Barrier ◽  
Light Emitting ◽  
Barrier Films ◽  
Organic Light ◽  
Layer Deposition
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