scholarly journals Reconstructing focused ion beam current density profile by iterative simulation methodology

2016 ◽  
Vol 34 (6) ◽  
pp. 06KO01 ◽  
Author(s):  
Eddie Chang ◽  
Kevin Toula ◽  
Valery Ray
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Current ◽  
Beam Current Density ◽  
Simulation Methodology ◽  
Current Density Profile

Amending the uniformity of ion beam current density profile

2007 ◽  
Author(s):  
Xiaowei Zhou ◽  
Dequan Xu ◽  
Ying Liu ◽  
Xiangdong Xu ◽  
Shaojun Fu
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Ion Beam ◽  
Beam Current ◽  
Beam Current Density ◽  
Current Density Profile

Measurements of beam current density and space potential in a highly focused ion beam of extremely low energy

2019 ◽  
Vol 28 (6) ◽  
pp. 065010
Author(s):  
Yoichi Hirano ◽  
Yutaka Fujiwara ◽  
Satoru Kiyama ◽  
Yamato Adachi ◽  
Hajime Sakakita
Keyword(s):  
Current Density ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Current ◽  
Low Energy ◽  
Beam Current Density ◽  
Space Potential

Current density profile characterization and analysis method for focused ion beam

2016 ◽  
Vol 155 ◽  
pp. 19-24 ◽  
Author(s):  
Yuval Greenzweig ◽  
Yariv Drezner ◽  
Shida Tan ◽  
Richard H. Livengood ◽  
Amir Raveh
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Analysis Method ◽  
Current Density Profile

Current density profile measurement on the Texas Experimental Tokamak using a heavy ion beam probe

1998 ◽  
Vol 69 (11) ◽  
pp. 3828-3834 ◽  
Author(s):  
J. G. Schwelberger ◽  
T. P. Crowley ◽  
K. A. Connor ◽  
P. M. Schoch
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Ion Beam ◽  
Heavy Ion ◽  
Profile Measurement ◽  
Current Density Profile ◽  
Heavy Ion Beam ◽  
Heavy Ion Beam Probe

Simulations and experiments of intense ion beam current density compression in space and time

2009 ◽  
Vol 16 (5) ◽  
pp. 056701 ◽  
Author(s):  
A. B. Sefkow ◽  
R. C. Davidson ◽  
E. P. Gilson ◽  
I. D. Kaganovich ◽  
A. Anders ◽  
...  
Keyword(s):  
Current Density ◽  
Ion Beam ◽  
Beam Current ◽  
Beam Current Density ◽  
Space And Time

Effects of Dwell Time and Current Density on Ion-Induced Deposition of Tungsten

1990 ◽  
Vol 181 ◽  
Author(s):  
Khanh Q. Tran ◽  
Yuuichi Madokoro ◽  
Tohru Ishitani ◽  
Cary Y. Yang
Keyword(s):  
Current Density ◽  
Dwell Time ◽  
Ion Beam ◽  
Dose Range ◽  
Beam Current ◽  
Beam Current Density ◽  
High Dose ◽  
Beam Diameter ◽  
Film Resistivity ◽  
Deposition Yield

ABSTRACT30-keV focused Ga+ ion beam was used for induced deposition of small-area tungsten thin films from W(CO)6 on Si and SiO2. Deposition yield, calculated assuming pure tungsten depositions, depends on dwell time (beam diameter/scan speed) and beam current density. High current density and/or long dwell time are known to cause low deposition yield because of the depletion of adsorbed gas molecules during ion beam irradiation. Based on a model taking this effect into account, numerical fitting was carried out. The reaction cross-section was estimated to be 1.4 × 10−14 cm2. For doses below 1017 ions/cm2, film resistivity decreases with increasing dose. This was confirmed for several dwell times. However, for doses above 1017 ions/cm2, film resistivity remains independent of dose. In this “high”-dose range, variation of beam current density has little effect on film resistivity. AES analyses revealed a consistency between film composition and resistivity. For a “high”-dose film with a resistivity of 190 μΩ-cm, the approximate tungsten content was 50 at%.

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