scholarly journals Isofocal dose based proximity effect correction tolerance to the effective process blur

2017 ◽  
Vol 35 (6) ◽  
pp. 06G505 ◽  
Author(s):  
Gerald G. Lopez ◽  
Mohsen Azadi ◽  
Meredith G. Metzler ◽  
Nikola Belic ◽  
Ulrich Hofmann
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction

Proximity effect correction by the GHOST method using a scattering stencil mask

1999 ◽  
Vol 17 (6) ◽  
pp. 2860 ◽  
Author(s):  
Hiroshi Yamashita ◽  
Eiichi Nomura ◽  
Shoko Manako ◽  
Hideo Kobinata ◽  
Ken Nakajima ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction

Proximity Effect Correction for Fresnel Holograms on Nanophotonic Phased Arrays

2021 ◽  
Author(s):  
Xuetong Sun ◽  
Yang Zhang ◽  
Po-Chun Huang ◽  
Niloy Acharjee ◽  
Mario Dagenais ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Phased Arrays ◽  
Proximity Effect Correction

Proximity effect correction sensitivity analysis

2010 ◽  
Author(s):  
Alex Zepka ◽  
Rainer Zimmermann ◽  
Wolfgang Hoppe ◽  
Martin Schulz
Keyword(s):  
Sensitivity Analysis ◽  
Proximity Effect ◽  
Proximity Effect Correction
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