Transient behavior in quasi-atomic layer etching of silicon dioxide and silicon nitride in fluorocarbon plasmas

2018 ◽  
Vol 36 (6) ◽  
pp. 06B101 ◽  
Author(s):  
Chad M. Huard ◽  
Saravanapriyan Sriraman ◽  
Alex Paterson ◽  
Mark J. Kushner
Keyword(s):  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Atomic Layer ◽  
Transient Behavior ◽  
Fluorocarbon Plasmas ◽  
Atomic Layer Etching

Role of physisorption in atomic layer etching of silicon nitride

2020 ◽  
Vol 38 (4) ◽  
pp. 043007
Author(s):  
Shyam Sridhar ◽  
Peter L. G. Ventzek ◽  
Alok Ranjan
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer ◽  
Atomic Layer Etching

Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators

2010 ◽  
Vol 107 (11) ◽  
pp. 114505 ◽  
Author(s):  
P. S. Waggoner ◽  
C. P. Tan ◽  
H. G. Craighead
Keyword(s):  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Atomic Layer ◽  
Silicon Dioxide Films

Atomic layer etching of silicon nitride using cyclic process with hydrofluorocarbon chemistry

2017 ◽  
Vol 56 (6S2) ◽  
pp. 06HB07 ◽  
Author(s):  
Yohei Ishii ◽  
Kazumasa Okuma ◽  
Tiffany Saldana ◽  
Kenji Maeda ◽  
Nobuyuki Negishi ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer ◽  
Cyclic Process ◽  
Atomic Layer Etching

In Situ Monitoring of Surface Reactions during Atomic Layer Etching of Silicon Nitride Using Hydrogen Plasma and Fluorine Radicals

2019 ◽  
Vol 11 (40) ◽  
pp. 37263-37269 ◽  
Author(s):  
Kazuya Nakane ◽  
René H. J. Vervuurt ◽  
Takayoshi Tsutsumi ◽  
Nobuyoshi Kobayashi ◽  
Masaru Hori
Keyword(s):  
Silicon Nitride ◽  
Hydrogen Plasma ◽  
Surface Reactions ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Atomic Layer Etching

Atomic layer etching of silicon nitride using infrared annealing for short desorption time of ammonium fluorosilicate

2017 ◽  
Vol 56 (6S2) ◽  
pp. 06HB01 ◽  
Author(s):  
Nobuya Miyoshi ◽  
Hiroyuki Kobayashi ◽  
Kazunori Shinoda ◽  
Masaru Kurihara ◽  
Tomoyuki Watanabe ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer ◽  
Desorption Time ◽  
Atomic Layer Etching
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