Model for atomic layer etching describes reaction mechanism for controlled silicon dioxide removal
2018 ◽
Vol 36
(6)
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pp. 06B101
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Keyword(s):
2020 ◽
Vol 38
(2)
◽
pp. 022605
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2017 ◽
Vol 50
(23)
◽
pp. 234001
◽
1995 ◽
Vol 13
(3)
◽
pp. 966-971
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Keyword(s):
2013 ◽
Vol 31
(6)
◽
pp. 061310
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Keyword(s):