Role of physisorption in atomic layer etching of silicon nitride
2020 ◽
Vol 38
(4)
◽
pp. 043007
2018 ◽
Vol 36
(6)
◽
pp. 06B101
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 56
(6S2)
◽
pp. 06HB07
◽
2017 ◽
Vol 35
(1)
◽
pp. 01A102
◽
2015 ◽
Vol 6
(18)
◽
pp. 3610-3614
◽
Keyword(s):
2019 ◽
Vol 11
(40)
◽
pp. 37263-37269
◽
Keyword(s):
2017 ◽
Vol 56
(6S2)
◽
pp. 06HB01
◽
2017 ◽
Vol 29
(14)
◽
pp. 6022-6029
◽
Keyword(s):
2019 ◽
Vol 37
(5)
◽
pp. 051002
◽