Reaction mechanism of N atoms interaction with low-k organosilicate glass films: Dynamic density functional theory study
2019 ◽
Vol 37
(6)
◽
pp. 061304
◽
2009 ◽
Vol 130
(21)
◽
pp. 214901
◽
2016 ◽
Vol 37
(2)
◽
pp. 121-122
◽
1999 ◽
Vol 110
(16)
◽
pp. 8032-8044
◽
2018 ◽
Vol 348
◽
pp. 630-636
◽