High resolution secondary ion mass spectrometry depth profiling using continuous sample rotation and its application to superlattice and delta‐doped sample analysis

1990 ◽  
Vol 8 (6) ◽  
pp. 4101-4103 ◽  
Author(s):  
Eun‐Hee Cirlin ◽  
John J. Vajo ◽  
Thomas C. Hasenberg ◽  
Robert J. Hauenstein
Keyword(s):  
Mass Spectrometry ◽  
High Resolution ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Sample Analysis ◽  
Sample Rotation ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

High-resolution secondary ion mass spectrometry depth profiling of nanolayers

2012 ◽  
Vol 26 (19) ◽  
pp. 2224-2230 ◽  
Author(s):  
Sergey V. Baryshev ◽  
Alexander V. Zinovev ◽  
C. Emil Tripa ◽  
Michael J. Pellin ◽  
Qing Peng ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
High Resolution ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

High-resolution secondary ion mass spectrometry depth profiling of superconducting thin films

1998 ◽  
Vol 317 (1-2) ◽  
pp. 237-240 ◽  
Author(s):  
N.J Montgomery ◽  
J.L MacManus-Driscoll ◽  
D.S McPhail ◽  
R.J Chater ◽  
B Moeckly ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
High Resolution ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Superconducting Thin Films ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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