Characterization at different aspect ratios (radius/length) of a radio frequency inductively coupled plasma source
1995 ◽
Vol 13
(5)
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pp. 2464-2469
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2001 ◽
Vol 390
(1-2)
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pp. 98-103
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2002 ◽
Vol 20
(5)
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pp. 1566-1573
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2014 ◽
Vol 85
(1)
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pp. 013510
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1983 ◽
Vol 2
(10)
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pp. 225-230
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Keyword(s):
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1996 ◽
Vol 143
(4)
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pp. 1375-1383
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2004 ◽
Vol 19
(1)
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pp. 149
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Keyword(s):
2015 ◽
Vol 24
(4)
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pp. 044007
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Keyword(s):
2012 ◽
Vol 27
(6)
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pp. 989
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