Electron cyclotron resonance plasma generation using a planar ring‐cusp magnetic field and a reentrant coaxial cavity

Electron Cyclotron ◽

Coaxial Cavity ◽

Plasma Generation ◽

Cusp Magnetic Field ◽

Plasma diagnostics of resonance magnetic field effects on a-Si:H thin films deposition using electron cyclotron resonance plasma

2015 China Semiconductor Technology International Conference ◽

10.1109/cstic.2015.7153464 ◽

2015 ◽

Author(s):

L.C. Hu ◽

Y.W. Lin ◽

C.J. Wang ◽

T. C. Wei ◽

C.R. Yang ◽

...

Keyword(s):

Magnetic Field ◽

Thin Films ◽

Plasma Diagnostics ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Field Effects ◽

Resonance Plasma ◽

Resonance Magnetic Field

Dependence of Electron Cyclotron Resonance Plasma Characteristics on Magnetic Field Profiles

10.1143/jjap.30.3147 ◽

1991 ◽

Vol 30 (Part 1, No. 11B) ◽

pp. 3147-3153 ◽

Cited By ~ 5

Author(s):

Seiji Samukawa ◽

Tsuyoshi Nakamura

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Characteristics ◽

Large volume electron cyclotron resonance plasma generation by use of the slotted antenna microwave source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579845 ◽

1995 ◽

Vol 13 (3) ◽

pp. 875-882 ◽

Cited By ~ 19

Author(s):

J. Engemann ◽

M. Schott ◽

F. Werner ◽

D. Korzec

Keyword(s):

Large Volume ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Source ◽

Plasma Generation ◽

Slotted Antenna ◽

Processing Uniformity Improvement by Magnetic Field Distribution Control in Electron Cyclotron Resonance Plasma Chamber

10.7567/ssdm.1992.a-2-6 ◽

1992 ◽

Cited By ~ 1

Author(s):

Hiroshi Nishimura ◽

Mikiho Kiuchi ◽

Seitaro Matsuo

Keyword(s):

Magnetic Field ◽

Field Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Field Distribution ◽

Plasma Chamber ◽

Electron cyclotron resonance plasma source in a flaring magnetic field

Plasma Sources Science and Technology ◽

10.1088/0963-0252/3/2/001 ◽

1994 ◽

Vol 3 (2) ◽

pp. 123-127 ◽

Cited By ~ 2

Author(s):

X Caron ◽

R L Meyer ◽

C Meis

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Plasma potential measurement in 2.45GHz electron cyclotron resonance plasma with a magnetron magnetic field configuration

Thin Solid Films ◽

10.1016/j.tsf.2010.03.153 ◽

2010 ◽

Vol 518 (22) ◽

pp. 6690-6693

Author(s):

Seong Bong Kim ◽

Won Namkung ◽

Moohyun Cho ◽

Dae Chul Kim ◽

Suk Jae Yoo

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Plasma Potential ◽

Field Configuration ◽

Electron Cyclotron ◽

Magnetic Field Configuration ◽

Potential Measurement ◽

Multi-Coil System for Electron Cyclotron Resonance Plasma Generation

10.1143/jjap.31.4343 ◽

1992 ◽

Vol 31 (Part 1, No. 12B) ◽

pp. 4343-4347

Author(s):

Tsuyoshi Nakamura ◽

Seiji Samukawa ◽

Toshinori Ishida ◽

Akihiko Ishitani ◽

Yutaka Kawase

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Generation ◽

Coil System ◽

11–13GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

Review of Scientific Instruments ◽

10.1063/1.2387885 ◽

2006 ◽

Vol 77 (11) ◽

pp. 113503 ◽

Cited By ~ 13

Author(s):

Toyohisa Asaji ◽

Yushi Kato ◽

Fuminobu Sato ◽

Toshiyuki Iida ◽

Junji Saito

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Ion Beam ◽

Plasma Source ◽

Field Configuration ◽

Electron Cyclotron ◽

Magnetic Field Configuration ◽

Optimally Stable Electron Cyclotron Resonance Plasma Generation and Essential Points for Compact Plasma Source

10.1143/jjap.31.4348 ◽

1992 ◽

Vol 31 (Part 1, No. 12B) ◽

pp. 4348-4356 ◽

Cited By ~ 7

Author(s):

Seiji Samukawa ◽

Tsuyoshi Nakamura ◽

Toshinori Ishida ◽

Akihiko Ishitani

Keyword(s):

Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Plasma Generation ◽

Uniform Electron Cyclotron Resonance Plasma Generation for Precise ULSI Patterning

10.1143/jjap.31.l774 ◽

1992 ◽

Vol 31 (Part 2, No. 6B) ◽

pp. L774-L776 ◽

Cited By ~ 1

Author(s):

Seiji Samukawa ◽

Tsuyoshi Nakamura ◽

Toshinori Ishida ◽

Akihiko Ishitani

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Generation ◽